2015
DOI: 10.1038/srep17103
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Switching operation and degradation of resistive random access memory composed of tungsten oxide and copper investigated using in-situ TEM

Abstract: In-situ transmission electron microscopy (in-situ TEM) was performed to investigate the switching operation of a resistive random access memory (ReRAM) made of copper, tungsten oxide and titanium nitride (Cu/WOx/TiN). In the first Set (Forming) operation to initialize the device, precipitation appeared inside the WOx layer. It was presumed that a Cu conducting filament was formed, lowering the resistance (on-state). The Reset operation induced a higher resistance (the off-state). No change in the microstructur… Show more

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Cited by 62 publications
(57 citation statements)
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References 43 publications
(75 reference statements)
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“…Then, dissolved Ag cations migrate and form a conducting bridge between the Ag top and Pt bottom electrodes ( Figure 6). [53,54] In contrast with the formation of the conducting filament, the rupture of the same filament occurs when an external bias is applied in the opposite direction. With this thermally assisted ion hopping transport, the Ag cations migrate and reach the Pt bottom electrode, which acts as a counter electrode.…”
Section: Wwwadvelectronicmatdementioning
confidence: 99%
See 1 more Smart Citation
“…Then, dissolved Ag cations migrate and form a conducting bridge between the Ag top and Pt bottom electrodes ( Figure 6). [53,54] In contrast with the formation of the conducting filament, the rupture of the same filament occurs when an external bias is applied in the opposite direction. With this thermally assisted ion hopping transport, the Ag cations migrate and reach the Pt bottom electrode, which acts as a counter electrode.…”
Section: Wwwadvelectronicmatdementioning
confidence: 99%
“…With this thermally assisted ion hopping transport, the Ag cations migrate and reach the Pt bottom electrode, which acts as a counter electrode. [53] When the conducting filament grows considerably large so as to rupture with the external bias, the device cannot become insulating, resulting to a switching failure. Therefore, the formation of the conducting bridge, which consists of Ag atoms, is achieved, and the resistance of the device is changed to LRS.…”
Section: Wwwadvelectronicmatdementioning
confidence: 99%
“…TEM is a microscopic imaging technique in which a beam of electrons is transmitted through an ultra-thin specimen (thickness < 100 nm) and an image is subsequently formed from the interaction between the electrons and the sample. Due to the small de Broglie wavelength of electrons, and especially thanks to recent technological advancements such as the introduction of spherical aberration correctors, state-of-the-art TEM instruments have reached unparalleled resolutions beyond the angstrom scale, making TEM one of the most powerful technologies to resolve the structural details of conducting filaments [9][10][11][12]. In addition, analytical studies of the filaments can be realized utilizing complementary techniques in TEM, such as energy dispersive X-ray spectroscopy (EDS or EDX), electron energy loss spectroscopy (EELS), and so on, providing further information about the composition and chemical states of filaments.…”
Section: Sample Structures Enabling In Situ Tem Observationsmentioning
confidence: 99%
“…Ag/a-Si(PECVD)/Pt b in situ TEM Filament [9] Ni/ZrO2/Pt -in situ TEM Filament [21] Ag/SiO2(PECVD)/p + -Si b in situ TEM Filament [14] Ag/SiO2(evaporated)/Pt b in situ TEM Filament [10] Cu/WOx/TiN -in situ TEM Filament [12] Au/SiO2(PECVD)/Ag nanoclusters/SiO2/p + -Si b in situ TEM Cluster [14] Au/SiO2(evaporated)/Ag nanoclusters/SiO2/Au b in situ TEM Cluster [10] Au/SiO2(evaporated)/Cu nanoclusters/SiO2/Au b in situ TEM Cluster [10] Au/SiO2(evaporated)/Ni nanoclusters/SiO2/Au c in situ TEM Cluster [10] Au/SiO2(evaporated)/Pt nanoclusters/SiO2/Au b in situ TEM Cluster [10] Cu/Ta2O5/Pt -ex situ TEM Filament [22] Ag/ZnO:Mn/Pt -ex situ TEM Filament [23] Ag/Ag30Ge17Se53/Pt -ex situ TEM Percolation [19] Planar Ag/H2O/Pt a SEM Filament [24] Ag/SiO2(sputtered)/Pt d ex situ TEM Filament [9] Ag/Al2O3/Pt b SEM Filament [9] Ag/Ag-PEO/Pt d SEM Filament [25] Ag/PEO/Pt b SEM Filament [25] Ag/a-Si(PECVD)/Pt b SEM Filament [9] Ag/TiO2/Pt -SEM Filament [26] Pd/SiOx(sputtered)/Pd b ex situ TEM Filament [27] Ag/PEDOT:PSS/Pt b SEM Filament [28] "-" implies the growth mode cannot be determined based on the reported results.…”
Section: Classification Of Dynamic Metal Filament Growth Modesmentioning
confidence: 99%
“…In the D1 device, the Ir buffer layer thickness is ≈2 nm. [41] This process goes on during cycling. Therefore, the copper diffusion could not be controlled.…”
Section: Figure 2amentioning
confidence: 99%