Submicrometer-Scale Patterning of Ceramic Thin Films

Martin, Christopher R.; Aksay, İlhan A.

doi:10.1023/b:jecr.0000034001.15359.98

Cited by 71 publications

(43 citation statements)

References 67 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…57 These methods have been reviewed recently. 58,59 The present review is focused on the site-selective deposition of ceramic thin films on substrates modified by selfassembled monolayer (SAM) with various functional groups. Patterned SAMs were used as templates for deposition of ceramics in aqueous solutions.…”

Section: 2mentioning

confidence: 99%

Nano/Micro Patterning of Inorganic Thin Films

Koumoto¹,

Saito²,

Gao³

et al. 2008

Bulletin of the Chemical Society of Japan

View full text Add to dashboard Cite

The present review is focused on the site-selective deposition of inorganic thin films on self-assembled monolayer (SAM) templates. SAMs were used to modify the substrate surface with chemical functional groups. The patterned SAM substrate was prepared by exposing the SAM substrate to UV light through photomasks for photocleavage. The patterned SAM was used as the templates for deposition of ceramic thin films in aqueous solutions. The preparation and characterization methods of SAMs, and the preparation of the patterned SAM templates are explained. Solution chemistry for the deposition of ceramic oxides and the physics and chemistry of interfaces are described. Experimental examples are given to explain how these aspects influence the formation of films and their properties. Various examples of site-selective deposition of ceramic oxides on SAM templates are explained with classification into three categories: patterning by site-selective attachment of homogeneously nucleated particles, patterning by surface-selective heterogeneous nucleation and growth, and patterning by catalyst-induced heterogeneous nucleation. We also describe pattern-deposition on flexible substrates and future views to improve the pattern resolution.

show abstract

Section: 2mentioning

confidence: 99%

Nano/Micro Patterning of Inorganic Thin Films

Koumoto¹,

Saito²,

Gao³

et al. 2008

Bulletin of the Chemical Society of Japan

View full text Add to dashboard Cite

show abstract

“…29,30 To date, the soft lithography techniques have met with much greater success with polymeric and metallic thin films than they have with ceramic materials. 29 The deposition of ceramics requires the use of a liquid precursor, typically in the form of a sol or colloidal suspension. These precursors contain a large amount of aqueous and organic material that must be removed during the conversion to a dense, solid phase.…”

Section: Soft Lithographymentioning

confidence: 99%

Microchannel Molding: A Soft Lithography-inspired Approach to Micrometer-scale Patterning

Martin

Aksay

2005

J. Mater. Res.

View full text Add to dashboard Cite

A new patterning technique for the deposition of sol-gels and chemical solution precursors was developed to address some of the limitations of soft lithography approaches. When using micromolding in capillaries to pattern precursors that exhibit large amounts of shrinkage during drying, topographical distortions develop. In place of patterning the elastomeric mold, the network of capillary channels was patterned directly into the substrate surface and an elastomer membrane is used to complete the channels. When the wetting properties of the substrate surfaces were carefully controlled using self-assembled monolayers (SAMs), lead zirconate titanate thin films with nearly rectangular cross-sections were successfully patterned. This technique, called microchannel molding (CM), also provided a method for aligning multiple layers such as bottom electrodes for device fabrication.

show abstract

“…The second approach has been widely developed since imprint lithography was proposed, such as soft lithography [6] and UV imprint lithography [7][8][9]. By the use of fabricated templates, many complicated micro/nano structures can be replicated in a large variety of materials and in large area efficiently, such as polymethylmethacrylate, ceramics, polystyrene, polyurethane and Teflon [10][11][12][13][14][15].…”

Section: Introductionmentioning

confidence: 99%

Research on the Forming Mechanism of Micro/Nano Features during the Cast Molding Process

Duan

Ding

2011

Nano-Micro Lett.

View full text Add to dashboard Cite

Abstract:Cast molding process has provided a reliable, simple and cost-effective way to fabricate micro structures since decades ago. In order to obtain structures with fine, dense and deep nano-size features by cast molding, it is necessary to study the forming mechanism in the process. In this paper, based on major steps of cast molding, filling models of liquid are established and solved; and the forming mechanism of liquid is revealed. Moreover, the scale effect between the liquid and the cavity on the filling velocity of liquid is studied. It is also interesting to find out that the wettability of liquid on the cavity may be changed from wetting to dewetting depends on the pressure difference. Finally, we experimentally verify some of our modeling results on the flowing and filling state of the liquid during the cast molding process.

show abstract

Submicrometer-Scale Patterning of Ceramic Thin Films

Cited by 71 publications

References 67 publications

Nano/Micro Patterning of Inorganic Thin Films

Nano/Micro Patterning of Inorganic Thin Films

Microchannel Molding: A Soft Lithography-inspired Approach to Micrometer-scale Patterning

Research on the Forming Mechanism of Micro/Nano Features during the Cast Molding Process

Contact Info

Product

Resources

About