2005
DOI: 10.1557/jmr.2005.0251
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Microchannel Molding: A Soft Lithography-inspired Approach to Micrometer-scale Patterning

Abstract: A new patterning technique for the deposition of sol-gels and chemical solution precursors was developed to address some of the limitations of soft lithography approaches. When using micromolding in capillaries to pattern precursors that exhibit large amounts of shrinkage during drying, topographical distortions develop. In place of patterning the elastomeric mold, the network of capillary channels was patterned directly into the substrate surface and an elastomer membrane is used to complete the channels. Whe… Show more

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Cited by 31 publications
(19 citation statements)
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“…[39][40][41] There are several variations available that are suited for the direct patterning of polymeric liquids. Microcontact printing m-CP is used for stamping self-assembled monolayers serving as a resist or as functional layers.…”
Section: Ceramic Nanostructures Via Lithographic Techniquesmentioning
confidence: 99%
“…[39][40][41] There are several variations available that are suited for the direct patterning of polymeric liquids. Microcontact printing m-CP is used for stamping self-assembled monolayers serving as a resist or as functional layers.…”
Section: Ceramic Nanostructures Via Lithographic Techniquesmentioning
confidence: 99%
“…Several strategies for modifying material topographies and surface properties have taken advantage of conventional surface micro-machining [7], laser ablation [8], micro-molding [9], biomimetic templating [10], physical and chemical vapor deposition processes [11], sol-gel procedures [12], and molecular self-assembly [13]. All these processes require enormous hands-on expertise and final result depends on several control parameters, whose interdependencies are normally complex to understand, characterize, model, and master [14].…”
Section: Introductionmentioning
confidence: 99%
“…However, they can be also adjusted and controlled by means of machining processes, chemical etchings, and post-processing tools along the product development cycle. Several strategies for modifying material topographies and surface properties (towards hierarchical materials, structures, and multi-scale devices) have made use of conventional surface micromachining [12], laser ablation [13], micromolding [14], biomimetic templating [15], thin film deposition processes based on physical or chemical vapor deposition [16], sol-gel procedures [17], molecular self-assembly [18], and electro-spinning [19][20][21]. All these procedures require an expertise that is sometimes difficult to achieve and repeatability is not easy [22,23].…”
Section: Introductionmentioning
confidence: 99%