Nano/Micro Patterning of Inorganic Thin Films

Abstract

The present review is focused on the site-selective deposition of inorganic thin films on self-assembled monolayer (SAM) templates. SAMs were used to modify the substrate surface with chemical functional groups. The patterned SAM substrate was prepared by exposing the SAM substrate to UV light through photomasks for photocleavage. The patterned SAM was used as the templates for deposition of ceramic thin films in aqueous solutions. The preparation and characterization methods of SAMs, and the preparation of the patterned SAM templates are explained. Solution chemistry for the deposition of ceramic oxides and the physics and chemistry of interfaces are described. Experimental examples are given to explain how these aspects influence the formation of films and their properties. Various examples of site-selective deposition of ceramic oxides on SAM templates are explained with classification into three categories: patterning by site-selective attachment of homogeneously nucleated particles, patterning by surface-selective heterogeneous nucleation and growth, and patterning by catalyst-induced heterogeneous nucleation. We also describe pattern-deposition on flexible substrates and future views to improve the pattern resolution.

Hierarchical structures of ZnO spherical particles synthesized solvothermally

“…Xu et al [5] reviewed the biomimetic growth of inorganic materials and discussed the generation of complex structures with a specific size, shape, orientation, composition and hierarchical organization under ambient conditions in aqueous environments. Koumoto et al [6] summarized the bioinspired patterning of the ceramic thin films by surface modification techniques. The effects of the surface functional groups of the substrates on the deposition of ceramics in aqueous solutions were studied and the site-selective deposition was demonstrated.…”

“…Another one featured the solution growth of functional ceramic nanomaterials, particularly the growth mechanisms of electrochemical and chemical bath reactions for various structures [8]. Many inorganic precipitates prepared in solutions have hierarchical structures [5][6][7][8].…”

Extremely Wetting Pattern by Photocatalytic Lithography and Its Application

“…It is of interest to note that a two dimensional (2D) pattern with smaller density of randomly packed ZnO nanorods, instead of the 3D pattern consisted of well-aligned vertical nanorods, which were confined and grown within the superhydrophilic regions. For practical application of thin film devices, the position and orientation-control of ZnO nanorods are very important because they directly relate to their physical and chemical performances (Koumoto et al, 2008;Masuda et al, 2006). In order to precisely control the spatial orientation of the ZnO nanostructures, we developed a new technique which is able to make the ZnO nanorods grow along the vertically aligned titania nanotubes rather by disordered deposition on the titania nanotube array surface.…”

Micrometer and nanometer-scale parallel patterning of ceramic and organic–inorganic hybrid materials

“…10 More focused reviews on site-selective liquid-phase deposition of ceramics via photolithography-aided patterning techniques were published by Masuda, Koumoto and co-workers. 13,14 The current review addresses low-cost micron and submicron-scale parallel patterning methods, with emphasis on the formation of patterned thin films of solid state materials, more specifically metal oxides and organic-inorganic silsesquioxane-based hybrid materials. It is motivated by the ongoing activity on the subject over the last years.…”