Study on reactive sputtering of yttrium oxide: Process and thin film properties

Lei, Pei; Leroy, Wouter; Dai, Bing; Zhu, Jiaqi; Chen, Xiaoting; Han, Jiecai; Depla, Diederik

doi:10.1016/j.surfcoat.2015.06.052

Cited by 46 publications

(14 citation statements)

References 50 publications

(64 reference statements)

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“…The extracted (i) and (ii) spectral components might originate from two different chemical environments of Y and O atoms, namely 1. a differing coordination between yttrium and oxygen due to two possible nonequivalent positions of yttrium on the cation sublattice, [39] 2. a reaction with hydrogen or water resulting in hydroxide formation at the surface (Y-OH). [31,40,41] Yttrium oxide is known to have a defective structure with defects in the anion lattice, and thus, has two preferred coordinations with oxygen. Nevertheless, the chemical shift of 1.0 eV seems too large for this scenario.…”

Section: Oxygen Engineering Of Devicesmentioning

confidence: 99%

“…However, it was recently demonstrated that the monoclinic phase can also be stabilized in yttria thin films at higher oxidation conditions. [ 31,32 ] Thus, the appearance of the 40

\overset{2}{true}

monoclinic reflection in the XRD patterns of the samples grown at high oxygen flow indicates their full oxygen stoichiometry.…”

Section: Oxygen Engineering Of Devicesmentioning

confidence: 99%

“…The extracted (i) and (ii) spectral components might originate from two different chemical environments of Y and O atoms, namely a differing coordination between yttrium and oxygen due to two possible nonequivalent positions of yttrium on the cation sublattice, [ 39 ] a reaction with hydrogen or water resulting in hydroxide formation at the surface (Y–OH). [ 31,40,41 ] …”

Section: Oxygen Engineering Of Devicesmentioning

confidence: 99%

“…a reaction with hydrogen or water resulting in hydroxide formation at the surface (Y–OH). [ 31,40,41 ]…”

Section: Oxygen Engineering Of Devicesmentioning

confidence: 99%

See 3 more Smart Citations

Tailoring the Switching Dynamics in Yttrium Oxide‐Based RRAM Devices by Oxygen Engineering: From Digital to Multi‐Level Quantization toward Analog Switching

Petzold

Piros

Eilhardt

et al. 2020

Adv Elect Materials

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Program under grant no. 805359-FOXON are gratefully acknowledged. E.M. also acknowledges the funding from the WAKeMeUP project as well as the support from the Ministerio de Ciencia, Innovación y Universidades, Spain (TEC2017-84321-C4-4-R and PCI2018-093107). Thanks to Katrin Walter for carrying out the UV/vis measurements and to Seyma Topcu for obtaining the current-voltage curves. S.P. and E.P. have equally contributed to the paper. Open access funding enabled and organized by Projekt DEAL.

show abstract

Section: Oxygen Engineering Of Devicesmentioning

confidence: 99%

“…However, it was recently demonstrated that the monoclinic phase can also be stabilized in yttria thin films at higher oxidation conditions. [ 31,32 ] Thus, the appearance of the 40

\overset{2}{true}

monoclinic reflection in the XRD patterns of the samples grown at high oxygen flow indicates their full oxygen stoichiometry.…”

Section: Oxygen Engineering Of Devicesmentioning

confidence: 99%

Section: Oxygen Engineering Of Devicesmentioning

confidence: 99%

“…a reaction with hydrogen or water resulting in hydroxide formation at the surface (Y–OH). [ 31,40,41 ]…”

Section: Oxygen Engineering Of Devicesmentioning

confidence: 99%

See 2 more Smart Citations

Tailoring the Switching Dynamics in Yttrium Oxide‐Based RRAM Devices by Oxygen Engineering: From Digital to Multi‐Level Quantization toward Analog Switching

Petzold

Piros

Eilhardt

et al. 2020

Adv Elect Materials

View full text Add to dashboard Cite

show abstract

“…For realizing interfacial yttria coatings on W f , there are several thin-film coating technologies available, such as atomic layer deposition, reactive magnetron sputtering, etc. [25,26]. Among these, the coating process that is widely used for producing yttrium oxide coating on tungsten fibers (i.e., magnetron sputtering) is not very efficient in terms of production.…”

Section: Introductionmentioning

confidence: 99%

Yttria-Coated Tungsten Fibers for Use in Tungsten Fiber-Reinforced Composites: A Comparative Study on PVD vs. CVD Routes

et al. 2021

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Tungsten fiber-reinforced tungsten (Wf/W) composites are being developed to improve the intrinsic brittleness of tungsten. In these composites, engineered fiber/matrix interfaces are crucial in order to realize toughening mechanisms. For such a purpose, yttria (Y2O3), being one of the suitable interface materials, could be realized through different coating techniques. In this study, the deposition of thin films of yttria on a 150 µm tungsten wire by physical and chemical vapor deposition (PVD and CVD) techniques is comparatively investigated. Although fabrication of yttria is feasible through both CVD and PVD routes, certain coating conditions such as temperature, growth rate, oxidation of Wf, etc., decide the qualitative nature of a coating to a particular extent. In the case of PVD, the oxidation of Wf is highly reduced compared to the WO3 formation in high-temperature CVD coating processes. Yttria-coated tungsten fibers are examined comprehensively to characterize their microstructure, phase, and chemical composition using SEM, XRD, and Raman spectroscopy techniques, respectively.

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Study on Structural and Thermal Characteristics of Heteroleptic Yttrium Complexes as Potential Precursors for Vapor Phase Deposition

et al. 2020

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Yttrium oxide (Y2O3) thin films are implemented as a functional component in a broad field of applications such as optics, electronics or thermal barrier coatings. Atomic layer deposition (ALD) is a promising technique to fabricate high‐quality thin films with atomic level precision in which the precursor choice plays a crucial role in process development. The limited number of suitable yttrium precursors available for ALD of Y2O3 has triggered increasing research activity seeking new or modified precursors. In this study, heteroleptic compounds of yttrium bearing the cyclopentadienyl (Cp) ligand in combination with the chelating amidinate or guanidinate ligands were targeted as potential precursors for ALD. In this context, a systematic and comparative study of the structure and thermal characteristics of (bis‐cyclopentadienyl‐(N,N'‐diisopropyl‐2‐methyl‐amidinato)yttrium) [YCp2(dpamd)] 1 and (bis‐cyclopentadienyl‐(N,N'‐diisopropyl‐2‐dimethylamido‐guanidinato)yttrium) [YCp2(dpdmg)] 2 was performed. Complementary characterization tools such as 1H‐NMR, elemental analysis, electron‐impact mass spectrometry (EI‐MS) and single‐crystal X‐ray diffraction (XRD) confirmed the spectroscopic purity and the monomeric nature of the metalorganic compounds. Hirshfeld surface analysis revealed influence of the ligand choice on the intermolecular interactions of the compounds. The important figures of merit for a precursor, namely the thermal properties were investigated via thermogravimetric analysis. Thus, the volatility, transport behavior and thermal stability were examined and compared to their homoleptic counterparts [YCp3], [Y(dpamd)3] or [Y(dpdmg)3].

show abstract

Study on reactive sputtering of yttrium oxide: Process and thin film properties

Cited by 46 publications

References 50 publications

Tailoring the Switching Dynamics in Yttrium Oxide‐Based RRAM Devices by Oxygen Engineering: From Digital to Multi‐Level Quantization toward Analog Switching

Tailoring the Switching Dynamics in Yttrium Oxide‐Based RRAM Devices by Oxygen Engineering: From Digital to Multi‐Level Quantization toward Analog Switching

Yttria-Coated Tungsten Fibers for Use in Tungsten Fiber-Reinforced Composites: A Comparative Study on PVD vs. CVD Routes

Study on Structural and Thermal Characteristics of Heteroleptic Yttrium Complexes as Potential Precursors for Vapor Phase Deposition

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