We measured the DC and RF characteristics at 300, 220, 150, 77, and 16 K of AlGaN/GaN metal‐insulator‐semiconductor (MIS) high electron mobility transistors (HEMTs) with SiN/SiO2/SiN triple‐layer insulators. The values of the cutoff frequency fT and the maximum transconductance gm_max increased with a decrease in temperature at relatively high temperatures, i.e. between 150 and 300 K. At temperatures below 100 K, the values of fT and gm_max increased slightly. We also carried out Monte Carlo simulations of electron transport in bulk GaN at various temperatures and electric fields. The steady‐state drift velocity of electrons showed a trend similar to those of the values of fT and gm_max. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)