Study and optimization of gas flow and temperature distribution in a Czochralski configuration

Fang, Haisheng; Jin, Ziliang; Huang, Xingyu

doi:10.1016/j.jcrysgro.2012.09.027

Cited by 5 publications

(1 citation statement)

References 15 publications

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“…Numerical simulation is an effective tool to study heat transfer in crystal growth and design a thermal field subsequently, which is conductive to solving the problem mentioned above. Researchers have conducted many numerical works to build models and analyze the heat transfer in CZ growth, leading to the optimization of design of the thermal field, such as the optimizations of the crucible position [22], heat shield design [23,24], radio frequency (RF) coils' position [25,26], furnace enclosure shape [27], and so on. Tang et al [28] mainly simulated the flow field of a Ga 2 O 3 melt and analyzed the difficulties of growing large-size bulk β-Ga 2 O 3 single crystals via CZ growth.…”

Section: Introductionmentioning

confidence: 99%

Numerical Simulation of β-Ga2O3 Single Crystal Growth by Czochralski Method with an Insulation Lid

Xia²,

Ma³

et al. 2022

Crystals

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The effect of an insulation lid on the growth of 4-inch β-Ga2O3 single crystals by the Czochralski method is analyzed by numerical simulation. The insulation lid mainly hinders upward radiant heat transfer from the melt and crucible and increases the axial temperature gradient in the crystal. Such benefits make the melt/crystal interface convex, which is conducive to suppressing spiral growth and growing large crystals with high quality. Materials with low thermal conductivity λ and low emissivity ε are the optimal choices for making an insulation lid. The inner hole has a great influence on the isolation of radiant heat, and it is determined that the maximum size of the inner diameter Din should not be larger than 130 mm. Thermal stress analysis results indicated that the insulation lid will cause a better stress distribution, illustrating the effect of the insulation lid on the quality of a cylindrical crystal.

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