Structure and Tribology Property of Carbon Nitride Films Deposited by MW-ECR Plasma Enhanced Unbalanced Magnetron Sputtering

Abstract

Carbon nitride films were deposited by a twinned microwave electron cyclotron resonance (ECR) plasma source enhanced unbalanced magnetron sputtering system. The results indicate that the structure of the films is sensitive to the nitrogen content. The increase in the nitrogen flow ratio leads to an increase in the sp3 content and an improvement of the tribological properties.

A comparative study of Si–C–N films on different substrates grown by RF magnetron sputtering

“…The C 1s spectra showed peaks at 285.11 eV due to C-C, 290.32 eV due to C-N and 292.57 eV due to C N ( Fig. 1(c)) [18][19][20]. The Raman spectra for all three films are exhibited in Fig.…”

“…2(b) for silicon substrates. The band with peak value at 1529 cm −1 called the G (graphitic) band, arises due to stretching of sp 2 , hybridised carbon [19][20][21][22][23]. For purely graphitic phase containing 100% sp 2 hybridised carbon the G band peak occurs at 1580 cm −1 .…”

Further improvement of mechanical and tribological properties of Cr-doped diamond-like carbon nanocomposite coatings by N codoping

“…The Raman spectra of DLC coatings can be fitted by two Gaussians peaks: the G peak at approximately 1540 cm −1 and the D peak at approximately 1347 cm −1 . 31) The G peak is due to the bond stretching of sp 2 configuration atoms in both rings and chains, while the D peak is due to the presence of sp 2 rings. 31) The band shift towards higher wave numbers and the increase in the intensity ratio of the D peak to the G peak (I D =I G ) with increasing N content are indications of the increase in the amount of sp 2 -bonded carbon, implying a higher sp 2 =sp 3 ratio in the N=Cr-DLC nanocomposite coatings.…”

“…31) The G peak is due to the bond stretching of sp 2 configuration atoms in both rings and chains, while the D peak is due to the presence of sp 2 rings. 31) The band shift towards higher wave numbers and the increase in the intensity ratio of the D peak to the G peak (I D =I G ) with increasing N content are indications of the increase in the amount of sp 2 -bonded carbon, implying a higher sp 2 =sp 3 ratio in the N=Cr-DLC nanocomposite coatings. 32,33) The increase in the I D =I G ratio has been attributed to the formation of more C=C bonds, which leads to an increase in the sp 2 carbon content in DLC coatings.…”