2007
DOI: 10.1109/led.2007.896896
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Strained-Si Channel Super-Self-Aligned Back-Gate/Double-Gate Planar Transistors

Abstract: We present a reproducible approach to the fabrication of super-self-aligned back-gate/double-gate n-channel and p-channel transistors with thin silicon channels and thick source/drain polysilicon regions. The device structure provides capability for scalable control of channel electrostatics, threshold variability without sacrificing source/drain series resistance, and capability of introducing strain to improve carrier transport. The separate device, circuit, and functional level back-gate access that is avai… Show more

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Cited by 3 publications
(2 citation statements)
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“…This provides an additional degree of freedom allowing for more flexible circuit design over using single-gate or common-gate counterparts, a feature especially important for adaptive circuit design. Devices with these attributes have been demonstrated by a number of groups [10], [11] in self-aligned geometry.…”
Section: Double-gate Mosfet and Its Modeling For Simulationsmentioning
confidence: 99%
“…This provides an additional degree of freedom allowing for more flexible circuit design over using single-gate or common-gate counterparts, a feature especially important for adaptive circuit design. Devices with these attributes have been demonstrated by a number of groups [10], [11] in self-aligned geometry.…”
Section: Double-gate Mosfet and Its Modeling For Simulationsmentioning
confidence: 99%
“…Traditionally, strained-Si (s-Si) layer is included for its advantageous characteristics such as enhanced carrier mobility, overshoot of carrier velocity, and higher ON current . [1][2][3][4][5][6] With the help of layer transfer technique, 7 biaxial-tensile strain is induced in Silicon material by developing the Silicon material over a Si 1 − X Ge X buffer material with bigger in plane lattice constant than the Silicon material, which is grown on Silicon on Insulator (SOI) body. Later, by selective etching process, the strained-Si layer is transferred on the surface of the SOI substrate by removing the Si 1 − X Ge X layer.…”
Section: Introductionmentioning
confidence: 99%