Static force measurement by piezoelectric sensors

Ozeri, Shaul; Shmilovitz, Doron

doi:10.1109/iscas.2006.1693799

Cited by 18 publications

(19 citation statements)

References 2 publications

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“…As the amplitude of static force touch is different within the users, to remove the effect of preload, an essential step is to detect the static force, which is treated as the preload applied from the user. Here, the change of resonant characteristics of piezoelectric device [23] is employed to detect the preload. It can be explained as the following demonstration.…”

Section: A Preload Detection Methodsmentioning

confidence: 99%

Preload Effect Elimination Technique for Piezoelectric Force Touch Sensing in Human-Machine Interactivities

Shi¹,

Chen²,

Lin³

et al. 2020

Preprint

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Piezoelectric touch sensing in interactive displays gains increasing attentions due to its high force detection sensitivity and intrinsic mechanical-to-electrical conversion ability. However, the instable force-voltage responsivity induced by preload effect of piezoelectric materials reduces the force detection accuracy of secondary force touches, which is important to touch and haptic applications such as peek-pop. To address this issue, in this article, we present a preload effect elimination technique, in which the relationship between the piezoelectric coefficients and static preload is studied first, and then the detected secondary force touch is calibrated by using the previously applied static force information. Experimental results demonstrate that the force detection accuracy is boosted by 15.17% after applying the developed technique to secondary force touches with different preload values, potentially allowing the system to precisely interpret secondary force touch amplitude and hence enhancing the development of touch sensing in interactive displays.

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Section: A Preload Detection Methodsmentioning

confidence: 99%

Preload Effect Elimination Technique for Piezoelectric Force Touch Sensing in Human-Machine Interactivities

Shi¹,

Chen²,

Lin³

et al. 2020

Preprint

View full text Add to dashboard Cite

show abstract

“…The electric charge generated by a piezoelectric element is proportional to the mechanical force acting on its free surfaces. The quasi-static force measurement, based on this piezoelectric effect, is known to be challenging due to free charge carriers drifting toward the dipoles under static stress in the piezoelectric crystal, leading to leakage of electric charge and current in the electronic circuit and causing significant drift of the measured force quantity [17,18]. Solutions proposed in the literature require detailed knowledge and precise manipulation of the system's electronic circuit, and/or of the environmental conditions (e.g., ambient temperature, humidity) to which the system is subjected during operation [18][19][20][21].…”

Section: Force Measurement Principlementioning

confidence: 99%

An In-Situ, Micro-Mechanical Setup with Accurate, Tri-Axial, Piezoelectric Force Sensing and Positioning

et al. 2020

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To enable accurate characterization of the mechanical behavior of materials at the micro-scale, e.g., in micro-systems, experiments are required that are representative of the actual (often multi-axial) loading conditions to which these materials are subjected during fabrication and operation. Equally important is the acquisition of mechanical data in the form of multi-axial force measurements, and the measurement of kinematics by in-situ microscopic techniques. To this end, a micro-mechanical testing rig is here realized using commercially available piezoelectric actuators. It is shown that the setup measures forces with a resolution of ∼ 0.3 [mN] in the xand y-directions, and ∼ 50 [mN] in the z-direction, over a range of 5 [N], yielding a high dynamic (force) range. Furthermore, displacements can be imposed with a resolution of ∼ 1 [nm] over a range of 200 [μm], in all three directions (x, y, z). The setup is compact, vacuum compatible, and specimens are loaded on top of the setup so that the field of view is unobstructed, allowing for in-situ testing with optical and scanning electron microscopy, and optical profilometry. A generic method is developed for extracting quasi-static forces from the piezoelectric actuators. Furthermore, challenges raised from the use of commercial actuators, for which the public technical specifications are generally incomplete, are overcome and the solution strategy is described. Proof-of-concept experiments on flexible, organic, light-emitting diodes demonstrate the potential of the setup to provide rich micro-mechanical data in the form of tri-axial force and displacement measurements. The commercial availability of the piezoelectric actuators, combined with the proposed engineering solutions lead to a generally accessible micro-mechanical test setup to investigate small-scale specimens under realistic, multi-axial loading conditions.

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“…The piezoelectric behavior can be characterized by the equivalent circuit of the Butterworth-Van Dyke (BVD) model [17][18][19][20][21][22][23][24][25][26] in Figure 2. C 1 , L 1 and R 1 known as the "the mechanical arm", describe the mechanical vibrations resulting from the piezoelectric effect with a finite quality factor.…”

Section: Theorymentioning

confidence: 99%

A wireless low-range pressure sensor based on P(VDF-TrFE) piezoelectric resonance

Kan

2010

Sensors and Actuators A: Physical

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A low-range bio-compatible pressure sensor based on P(VDF-TrFE) piezoelectric resonance has been tested and integrated to a wireless platform. Many critical physiological applications and in-vivo diagnosis require highly sensitive pressure monitoring in the 0-100kPa range, with negligible long-term drift and robust integration platform. The PVDF film and its copolymers exhibit significant piezoelectric properties after poling. P(VDF-TrFE) is preferred for its flexible film structure, low modulus, high yield strength and resistance to corrosive chemicals. All piezoelectric materials are lossy and thus the leakage current will cause drift of instantaneous response, which limits the direct use of piezoelectric charges in sensing.In this paper, the pressure sensor which adopts the appropriate properties of P(VDFTrFE) for low pressure levels, works as an acoustic wave resonator to avoid long-term

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Static force measurement by piezoelectric sensors

Cited by 18 publications

References 2 publications

Preload Effect Elimination Technique for Piezoelectric Force Touch Sensing in Human-Machine Interactivities

Preload Effect Elimination Technique for Piezoelectric Force Touch Sensing in Human-Machine Interactivities

An In-Situ, Micro-Mechanical Setup with Accurate, Tri-Axial, Piezoelectric Force Sensing and Positioning

A wireless low-range pressure sensor based on P(VDF-TrFE) piezoelectric resonance

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