A wireless low-range pressure sensor based on P(VDF-TrFE) piezoelectric resonance

Abstract

A low-range bio-compatible pressure sensor based on P(VDF-TrFE) piezoelectric resonance has been tested and integrated to a wireless platform. Many critical physiological applications and in-vivo diagnosis require highly sensitive pressure monitoring in the 0-100kPa range, with negligible long-term drift and robust integration platform. The PVDF film and its copolymers exhibit significant piezoelectric properties after poling. P(VDF-TrFE) is preferred for its flexible film structure, low modulus, high yield strength and resistance to corrosive chemicals. All piezoelectric materials are lossy and thus the leakage current will cause drift of instantaneous response, which limits the direct use of piezoelectric charges in sensing.In this paper, the pressure sensor which adopts the appropriate properties of P(VDFTrFE) for low pressure levels, works as an acoustic wave resonator to avoid long-term

Cobalt–titanium multilayer thin films: Effect of thickness of titanium spacer layer on impedance properties

“…It can then be said that this resonance corresponds to a piezoelectric vibration mode. However, in general, piezoelectric resonance occurs at frequencies at order of kilohertz or megahertz [18][19][20][21][22][23]. Regular circles clearly show that incomplete part of the resonance behavior is symmetric.…”

Review of Physical Principles of Sensing and Types of Sensing Materials

“…They transform energy from mechanical to electrical and vice versa (75). The former is called the direct effect and is used in sensing dynamic pressure changes, changes in acceleration (from shock or vibration), and changes in force (85)(86)(87). The former is called the direct effect and is used in sensing dynamic pressure changes, changes in acceleration (from shock or vibration), and changes in force (85)(86)(87).…”

A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure

“…Also it has a confliction between the sensitivity and parasitic capacitance [6]. The piezoelectric sensor requires a relatively strict measuring condition and a complicated circuit [7,8]. The optical fiber grating sensor has the restriction in the installation [9].…”