Spray Pyrolysis Technique; High-K Dielectric Films and Luminescent Materials: A Review

Abstract

The spray pyrolysis technique has been extensively used to synthesize materials for a wide variety of applications such as micro and sub-micrometer dimension MOSFET´s for integrated circuits technology, light emitting devices for displays, and solid-state lighting, planar waveguides and other multilayer structure devices for photonics. This technique is an atmospheric pressure chemical synthesis of materials, in which a precursor solution of chemical compounds in the proper solvent is sprayed and converted into powders or films through a pyrolysis process. The most common ways to generate the aerosol for the spraying process are by pneumatic and ultrasonic systems. The synthesis parameters are usually optimized for the materials optical, structural, electric and mechanical characteristics required. There are several reviews of the research efforts in which spray pyrolysis and the processes involved have been described in detail. This review is intended to focus on research work developed with this technique in relation to high-K dielectric and luminescent materials in the form of coatings and powders as well as multiple layered structures.

Nanostructured Titanium Dioxide Surfaces for Electrochemical Biosensing

“…Spray Pyrolysis (SP) is commonly used to synthesize solid powders and films of metal oxide. However, metals and semiconductors can also be obtained by making a convenient choice of deposition environment and carrier gas, i.e., by using the appropriate composition of the precursor solution, the suitable carrier gas and the flux rate that facilitate the reactive interaction with such precursor [36,37]. Raut et al obtained thin films of nanocrystalline TiO 2 on glass and quartz substrates by SP, using the configuration shown in Figure 4.…”

Solution-Processed Chalcogenide Photovoltaic Thin Films

“…In general, the success of the deposition of a thin film by spray-pyrolysis depends mainly on three factors: the composition of the precursor solution, the atomization and droplet transport process and the substrate temperature [30]. The control or modification of these parameters directly impacts the quality of the obtained film.…”

Solid State NMR Spectroscopy a Valuable Technique for Structural Insights of Advanced Thin Film Materials: A Review

“…The sol-gel method has been applied to synthesize metal oxides, where it simply relies on the conversion of a colloidal suspension "sol" into a viscous gel [42]. Additionally, among the other important chemical deposition techniques that have been widely applied are: chemical vapor deposition (CVD) [43][44][45][46], spin coating [47][48][49], dip coating [50,51], chemical bath deposition [52,53] and spray pyrolysis technique [54,55].…”