2008
DOI: 10.5781/kwjs.2008.26.1.024
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Solder Bumping for Flip Chip Bonding

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“…The disadvantage of MacEtch is that metals used as catalysts, such as Ag, Au, Pt, Pd, and Cu, are expensive, and the diffusion of silicon can adversely affect the performance of CMOS, etc. [73,74]. Recently, the addition of TiN and various carbon nanomaterials such as CNTs, graphite, graphene, and graphene oxide (GO) have been reported [75].…”
Section: Tsv Sidewall With Scallop-free Etchingmentioning
confidence: 99%
“…The disadvantage of MacEtch is that metals used as catalysts, such as Ag, Au, Pt, Pd, and Cu, are expensive, and the diffusion of silicon can adversely affect the performance of CMOS, etc. [73,74]. Recently, the addition of TiN and various carbon nanomaterials such as CNTs, graphite, graphene, and graphene oxide (GO) have been reported [75].…”
Section: Tsv Sidewall With Scallop-free Etchingmentioning
confidence: 99%