Sol-gel hybrid glass diffractive elements by direct electron-beam exposure

Rantala, Juha; Nordman, Nina; Nordman, Olli; Vähäkangas, Jouko; Honkanen, Seppo; Peyghambarian, N.

doi:10.1049/el:19980368

Cited by 23 publications

(7 citation statements)

References 5 publications

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“…6,9 Synthesis and the sample preparation are schematically shown in Figure 1. Precursors for the preparation of the UV-sensitive sol-gel derived coating solutions were purchased from Fluka Chemie and were used without further purification.…”

Section: Preparation Of the Axiconsmentioning

confidence: 99%

“…6 The main advantages of the sol-gel derived hybrid materials are the molecular level tailoring and the low temperature (below 100°C) processing which enables the integration of the optical structures on plastics. Several methods have been proposed for the fabrication of optical components using solgel hybrid materials: UV-light imprinting, 7 laser writing, 8 direct electron beam writing, 9 laser holography, 10 and embossing. 11 UV-light imprinting is the most promising technique, of the methods listed above, for the mass production of accurate features.…”

Section: Introductionmentioning

confidence: 99%

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<title>Morphological and optical characterization of hybrid-glass-based axicons</title>

et al. 2002

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This paper introduces the usage of directly UV-photopatternable sol-gel based materials and the processing methods for the fabrication of binary diffractive optical elements. We designed and modeled a binary axicon -an optical element, which produces almost diffraction free beam in a specified distance from the element. We fabricated sol-gel based hybrid-glass materials and tailored their processing parameters to fit the demands of the axicon design. Resolution of 2 microns, film thickness of 850 nm, and certain morphological properties were required. The materials were derived from zirconium(IV)isopropoxide, methacrylic acid, and methacryloxypropyltritethoxysilane. We determined the morphological and line quality of the fabricated axicons as a function of the UV-irradiation dose. In addition, we measured the optical characteristics of the axicons in terms of the axial and radial intensity profiles. The reasons for the differences between calculated and measured values are discussed.

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Section: Preparation Of the Axiconsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

<title>Morphological and optical characterization of hybrid-glass-based axicons</title>

et al. 2002

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“…The authors of Ref [7,8] presented the fabrication of gratings in SiO 2 /ZrO 2 based sol-gel by employing contact imprinting and optical interference techniques. Rantala et al demonstrated the fabrication of surface relief diffractive grating in the SiO 2 /ZrO 2 sol-gel glass using direct variable-dose electron-beam lithograph [9]. A SiO 2 /TiO 2 sol-gel glass was also developed to fabricate saw-tooth gratings by the direct laser writing and microlenses by using the highenergy beam-sensitive (HEBS) gray scale mask [10,11].…”

Section: Introductionmentioning

confidence: 99%

Lithographic fabrication of diffractive optical elements in hybrid sol-gel glass on 3-D curved surfaces

Wang¹,

Yu²,

Zhang³

et al. 2010

Opt. Express

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We demonstrate the lithographic fabrication of diffractive optical elements (DOEs) in hybrid SiO2/TiO2 sol-gel glass on 3-D curved surfaces. The concentric circular gratings with periods of 20 μm, 10 μm and 5 μm have been fabricated in sol-gel glass on concave lens by laser direct writing successfully. Continuous 3-Dimensional surface relief with a height of 435 nm, 110 nm and 50 nm has been obtained for the period of 20 μm, 10 μm and 5 μm respectively. The optical test results of the fabricated DOE shows only a little bit deviation from the theoretical calculated results which can be explained by 3-D curved surface effect. We believe this technology can be an effective method to fabricate DOEs with even more complex surface profile on 3-D curved surfaces in terms of its simplicity and cost-effectiveness.

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“…The microlens was directly built into the inorganic-organic hybrid sol-gel material by simply using the reflow technique. The distinct advantage of the sol-gel materials over conventional photoresist-based in the fabrication of micro-optical elements lies in its single developing step without etching process [10][11][12][13][14][15], and the reflow technique only requires ordinary binary photomask to pattern the photosensitive material. Thus, the proposed fabrication process of the microlens, based on a combination of the hybrid sol-gel material and the reflow technique is an etch-free fabrication process no need of costly high-energy beam-sensitive gray scale mask, which is especially suitable for low-cost and high-yield mass production.…”

Section: Introductionmentioning

confidence: 99%

Reflowed sol-gel microlens for coupling a laser diode and a single-mode fiber with high efficiency: a cost-effective and high-volume fabrication solution

Yuan

Ngo

et al. 2004

SPIE Proceedings

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In optical communications and optical interconnects, high coupling efficiency between a laser diode and a single mode fiber is indispensable, while the coupling loss mainly originates from the mismatch of their numerical apertures. In order to improve the coupling efficiency, it is a practical scheme to introduce a refractive microlens between them. Nevertheless, the fabrication of refractive microlens array (MLA) often required complicated lithographic and etching process. Moreover, structural homogeneity and dimensional uniformity of fabricated MLA were difficult to sustain. In this paper, we extend the application of low-cost inorganic-organic SiO 2 /ZrO 2 sol-gel glass with a simple reflow technique for fabrication of refractive MLA. The intrinsic advantages of hybrid sol-gel material lay not only as an etchfree single-step fabrication material, but also, its uniformity and other excellent optical properties. The adoption of reflow technique in the fabrication of refractive MLA is much more economical and suitable to mass production as expensive high-energy beam-sensitive gray-scale mask, or etching processes is not required. The fabricated refractive MLA have excellent surface smoothness and dimension uniformity, which can provide high coupling efficiency of a laser diode to a single mode fiber. The proposed microlens coupling scheme has the advantages of low coupling loss, low cost and small package volume.

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Sol-gel hybrid glass diffractive elements by direct electron-beam exposure

Cited by 23 publications

References 5 publications

<title>Morphological and optical characterization of hybrid-glass-based axicons</title>

<title>Morphological and optical characterization of hybrid-glass-based axicons</title>

Lithographic fabrication of diffractive optical elements in hybrid sol-gel glass on 3-D curved surfaces

Reflowed sol-gel microlens for coupling a laser diode and a single-mode fiber with high efficiency: a cost-effective and high-volume fabrication solution

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