We propose a combined far ultraviolet (FUV) and thermal annealing method of metal-nitrate-based precursor solutions that allows efficient conversion of the precursor to metal-oxide semiconductor (indium zinc oxide, IZO, and indium oxide, In2O3) both at low-temperature and in short processing time. The combined annealing method enables a reduction of more than 100 °C in annealing temperature when compared to thermally annealed reference thin-film transistor (TFT) devices of similar performance. Amorphous IZO films annealed at 250 °C with FUV for 5 min yield enhancement-mode TFTs with saturation mobility of ∼1 cm2/(V·s). Amorphous In2O3 films annealed for 15 min with FUV at temperatures of 180 °C and 200 °C yield TFTs with low-hysteresis and saturation mobility of 3.2 cm2/(V·s) and 7.5 cm2/(V·s), respectively. The precursor condensation process is clarified with x-ray photoelectron spectroscopy measurements. Introducing the FUV irradiation at 160 nm expedites the condensation process via in situ hydroxyl radical generation that results in the rapid formation of a continuous metal-oxygen-metal structure in the film. The results of this paper are relevant in order to upscale printed electronics fabrication to production-scale roll-to-roll environments.
In this case study, the possibilities of hybrid integration of printed and flexible electronics in combination with conventional electronic components to create new types of product concepts is demonstrated. The final result is a personal activity meter demonstrator, which is realized by utilizing various flexible electronics manufacturing and integration techniques. Roll-to-roll printing was used to print the electronic backplane as well as co-planar electrochromic (EC) display. A pick-and-place assembled microcontroller unit and accelerometer, together with passive components, provided the brains for the system. Injection molding was then utilized to create a structural electronics system including an EC display. To validate the feasibility and scalability of the processes used, 100 pieces of the personal activity meter were fabricated. Modeling with continuum computational fluid dynamics and numerical heat transfer, using the high-performance finite volume method, showed that high filling pressure and shear-stress are the key factors causing broken devices. The stability of the devices in harsh environmental conditions as well as in bending seem to be slightly improved in the over molded samples. INDEX TERMS Electrochromic displays, injection molding, hybrid integration, printed electronics, structural electronics. TERHO KOLOLUOMA received the Ph.D. degree in chemistry from the University of Oulu in 2003. From 1998 to 1999, he was with the University of Oulu having a responsibility on fabrication and characterization of solgel-based materials. From 1999 to 2003, he was with VTT Electronics for developing new materials for optoelectronic applications. During that period, he started the first experiments in the area of roll-to-roll printed electronics and optoelectronics and started to lead various research project in that field. After finishing his Ph.D. thesis in 2003, he started as a Senior Scientist focusing on development of printed electronics components and technologies, and since 2010, he has a Principal Scientist. From 2013 to 2015, he was with National Research Council Canada, he is currently a Research Team Leader of printed electronics processing team with VTT. His main research topic is printable optics and electronics. Of his special interests are novel materials for printed electronics and materials-process interface.
In the recent years, there has been a growing interest towards printed stretchable electronics used in diagnostics, health-monitoring, and wearable applications. Double-sided electronic circuits with through-substrate vias offer a solution where the amount of printed circuitry and assembled SMDs (surface-mount devices) in direct contact with the human skin can be minimized. This improves not only the wearability and cost-effectiveness of the printed electronic devices but also the product safety and comfort to wear. Another factor decreasing the unit costs in printed electronics is the use of high volume, high speed, and continuous roll-to-roll (R2R) manufacturing processes. In this current paper, a full R2R process for the manufacturing of through-substrate vias on stretchable thermoplastic polyurethane (TPU) substrate was developed and verified. The through-substrate via-holes were manufactured in R2R using either laser-cutting or die-cutting. Rotary screen printing was used to print conductive tracks onto both sides of the stretchable substrate and to fill the via-holes. Eventually, conductive and stretchable through-substrate vias with low sheet resistance and low resistance deviation were reliably achieved with the developed process.
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