Soft magnetism of nanocrystalline Fe based sputtered films with high Bs

Takahashi, M.; Shimatsu, T.

doi:10.1016/0304-8853(91)90660-3

Cited by 5 publications

(1 citation statement)

References 10 publications

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“…On a laboratory scale the magnetic properties of these films have been investigated for more than ten years [4]- [6]. The key to achieve soft magnetic properties is the preparation of a nanocrystalline structure in these films [4], [5].…”

Section: Introductionmentioning

confidence: 99%

Improved magnetic anisotropy and magnetostriction by laminating FeAl(N) with Permalloy to multilayers

Maaß¹,

Rohrmann²

1998

IEEE Trans. Magn.

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High Bs FeAl(N) single and FeAl(N)NiFe multilayer films have been prepared by RF-Diode sputtering in a Arm2 mixture on substrates up to 6" diameter using a commercial sputter machine. Preparing the films under an aligning magnetic field led to an uniaxial anisotropy with angular dispersions less than lo. A magnetostriction of hs I 1*10" and Hc, HK ~j 2.5 Oe was achieved for single films. The FeAl(N)/NiFe multilayers display an improved anisotropic behaviour and smaller HC and hs although Bs is only somewhat below the a-Fe value. Depending on layer periodiciiy, HK varies between 2.3 and 6 Oe for 0.5 pm thick films.

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Section: Introductionmentioning

confidence: 99%

Improved magnetic anisotropy and magnetostriction by laminating FeAl(N) with Permalloy to multilayers

Maaß¹,

Rohrmann²

1998

IEEE Trans. Magn.

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Structure and magnetic properties of FeTiN films deposited by dc magnetron facing target sputtering

Peng

Sumiyama

Oku

et al. 1996

Phys. Stat. Sol. (a)

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Using a facing target sputtering equipment, FeTiN films were deposited on water‐cooled and heated substrates under different nitrogen flow ratios, R(N2). The composition, microstructure, and magnetic properties of the films were investigated by Auger electron spectroscopy (AES), X‐ray photoelectron spectroscopy (XPS), X‐ray diffraction (XRD), and a vibrating sample magnetometer (VSM). The films consist of α‐Fe, TiNx, and Fe4N, where the volume fraction of these phases varies with R(N2) and the substrate temperature during sputtering. The α‐Fe(Ti) films with supersaturated nitrogen exhibit a larger Ms than the Fe‐Ti films. However, Hc first decreases and then increases with increasing R(N2). This is ascribed to a distortion of the α‐Fe lattice due to doping of Ti atoms and the compressive stress caused by the incorporation of sufficient nitrogen atoms.

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The influence of high-dose nitrogen implantation on the soft magnetic properties of FeAlBZr nanometer materials

Zhang

Liu

Wang

1997

Vacuum

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Soft magnetism of nanocrystalline Fe based sputtered films with high Bs

Cited by 5 publications

References 10 publications

Improved magnetic anisotropy and magnetostriction by laminating FeAl(N) with Permalloy to multilayers

Improved magnetic anisotropy and magnetostriction by laminating FeAl(N) with Permalloy to multilayers

Structure and magnetic properties of FeTiN films deposited by dc magnetron facing target sputtering

The influence of high-dose nitrogen implantation on the soft magnetic properties of FeAlBZr nanometer materials

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