Single-Structure Micromachined Three-Axis Gyroscope With Reduced Drive-Force Coupling

Sonmezoglu, Soner; Taheri-Tehrani, Parsa; Valzasina, Carlo; Falorni, Luca; Zerbini, Sarah; Nitzan, Sarah H.; Horsley, David A.

doi:10.1109/led.2015.2454511

Cited by 40 publications

(13 citation statements)

References 10 publications

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“…Sensors with air-gap structures are used in numerous applications, such as capacitive touch sensors [ 15 ], pressure sensors [ 16 ], accelerometers [ 17 ], and gyroscopes [ 18 , 19 ]. Their fabrication is usually based on the semiconductor process where the etching process is used to fabricate devices with air-gap structures such as cantilever, bridge, and comb-drive [ 20 , 21 , 22 ].…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Characterization of Roll-to-Roll Printed Air-Gap Touch Sensors

Lee

2019

Polymers

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Although printed electronics technology has been recently employed in the production of various devices, its use for the fabrication of electronic devices with air-gap structures remains challenging. This paper presents a productive roll-to-roll printed electronics method for the fabrication of capacitive touch sensors with air-gap structures. Each layer of the sensor was fabricated by printing or coating. The bottom electrode, and the dielectric and sacrificial layers were roll-to-roll slot-die coated on a flexible substrate. The top electrode was formed by roll-to-roll gravure printing, while the structural layer was formed by spin-coating. In particular, the sacrificial layer was coated with polyvinyl alcohol (PVA) and removed in water to form an air-gap. The successful formation of the air-gap was verified by field emission scanning electron microscopy (FE-SEM). Electrical characteristics of the air-gap touch sensor samples were analyzed in terms of sensitivity, hysteresis, and repeatability. Experimental results showed that the proposed method can be suitable for the fabrication of air-gap sensors by using the roll-to-roll printed electronics technology.

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Section: Introductionmentioning

confidence: 99%

Fabrication and Characterization of Roll-to-Roll Printed Air-Gap Touch Sensors

Lee

2019

Polymers

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“…However, in multi-axis gyroscopes, decoupling the drive and sense modes becomes even more complicated. In [20], the drive mode was decoupled from the sense modes by driving the multi-axis gyroscope with secondary auxiliary masses. Driving with the auxiliary masses reduced the in-phase mechanical motion of the drive mode in the sense modes, resulting in high bias stability.…”

Section: Introductionmentioning

confidence: 99%

Single Drive Multi-Axis Gyroscope with High Dynamic Range, High Linearity and Wide Bandwidth

2019

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This paper presents the design, fabrication, and characterization of a highly sensitive, single drive multi-axis gyroscope. The multi-axis gyroscope allows for a wide bandwidth in all three axes (X, Y, Z) and exhibits high linearity. The fabricated multi-axis gyroscope was fabricated with a structural thickness of 30 µm and packaged at 100 mtorr using wafer level packaging. The fabricated multi-axis gyroscope has a small footprint of 1426 × 1426 µm2, making it one of the smallest multi-axis gyroscopes. A custom printed circuit board (PCB) was designed for the evaluation of the multi-axis gyroscope. The experimental results demonstrate that the gyroscope has a high sensitivity of 12.56 μ V / dps , 17.13 μ V / dps and 25.79 μ V / dps in the roll (X-sense), pitch (Y-sense) and yaw (Z-sense) modes respectively. The scale-factor non-linearity of the gyroscope is less than 0.2 % for roll and pitch mode and 0.001 % for the yaw mode, in the full-scale range of ± 1500 deg / s . The multi-axis gyroscope demonstrates an angle random walk of 2.79 dps / Hz , 2.14 dps / Hz , and 1.42 dps / Hz , for the roll, pitch and yaw rate with the in-run bias stability 1.62 deg / s , 1.14 deg / s and 0.84 deg / s respectively.

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“…[7]), quadrature reduction (see e.g. [8] and [9]) and stability (see e.g. [10] and [11]), there is still the need to calibrate each device with consequent high costs for the MEMS industry.…”

Section: Introductionmentioning

confidence: 99%

A new MEMS three-axial frequency-modulated (FM) gyroscope: a mechanical perspective

Zega

Comi

Minotti

et al. 2018

European Journal of Mechanics - A/Solids

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Micro-Electro-Mechanical Systems (MEMS) gyroscopes are inertial sensors for the measurement of angular rates. They have a variety of applications from consumer electronics to drones and the need of stability against environmental fluctuations, such as temperature, is a key factor in order to avoid expensive calibration procedures.Frequency Modulation (FM) has been recently proposed as an innovative working principle for MEMS gyroscopes and as the desired solution in terms of stability against environmental fluctuations.In this paper, the FM working principle is formalized for the three-axial case for the first time and the governing equations are derived both in the idealized case of a point-mass gyroscope and in the real case of a distributed-mass gyroscope. Moreover, the mechanical structure of the first three-axial MEMS FM gyroscope is proposed and studied. Preliminary experimental measurements prove the validity of both the model and the simulations results employed during the design process. The proposed structure overcomes lots of the constraints of the surface micromachining fabrication processes and represents an important step towards the development of a new class of MEMS gyroscopes.

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Single-Structure Micromachined Three-Axis Gyroscope With Reduced Drive-Force Coupling

Cited by 40 publications

References 10 publications

Fabrication and Characterization of Roll-to-Roll Printed Air-Gap Touch Sensors

Fabrication and Characterization of Roll-to-Roll Printed Air-Gap Touch Sensors

Single Drive Multi-Axis Gyroscope with High Dynamic Range, High Linearity and Wide Bandwidth

A new MEMS three-axial frequency-modulated (FM) gyroscope: a mechanical perspective

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