Single Drive Multi-Axis Gyroscope with High Dynamic Range, High Linearity and Wide Bandwidth

Iqbal, Faisal; Din, Hussamud; Lee, Byeungleul

doi:10.3390/mi10060410

Cited by 14 publications

(8 citation statements)

References 23 publications

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“…The experiments were performed on the previously fabricated multi-axis MEMS gyroscope using the same experimental setup. The detailed structure design and experimental arrangement is presented in [ 29 ].…”

Section: Resultsmentioning

confidence: 99%

“…Drive-scheme of the designed gyroscope has the ability to reduce the slide-film damping and keep the unwanted resonant modes at higher frequencies. The Z-shaped coupling spring can limit the drive displacement amplitude in one of the two drive axes; i.e., x-masses drive displacement x dx and y-masses drive displacement x dy are not equal [ 29 , 30 ]. The outer double-folded springs are responsible for sense-motion, however

and

correspond to angular rate in x-axis they were named as x-masses, whereas

and

were named as y-masses, which corresponds to the angular rate in y-axis as shown in Figure 2 b,c, respectively.…”

Section: Mechanical Structure Of the Designed Gyroscopementioning

confidence: 99%

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Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

2021

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In this paper, a new design technique is presented to estimate and reduce the cross-axis sensitivity (CAS) in a single-drive multi-axis microelectromechanical systems (MEMS) gyroscope. A simplified single-drive multi-axis MEMS gyroscope, based on a mode-split approach, was analyzed for cross-axis sensitivity using COMSOL Multiphysics. A design technique named the “ratio-matching method” of drive displacement amplitudes and sense frequency differences ratios was proposed to reduce the cross-axis sensitivity. Initially, the cross-axis sensitivities in the designed gyroscope for x and y-axis were calculated to be 0.482% and 0.120%, respectively, having an average CAS of 0.301%. Using the proposed ratio-matching method and design technique, the individual cross-axis sensitivities in the designed gyroscope for x and y-axis were reduced to 0.018% and 0.073%, respectively. While the average CAS was reduced to 0.045%, showing a reduction rate of 85.1%. Moreover, the proposed ratio-matching method for cross-axis sensitivity reduction was successfully validated through simulations by varying the coupling spring position and sense frequency difference variation analyses. Furthermore, the proposed methodology was verified experimentally using fabricated single-drive multi-axis gyroscope.

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Section: Resultsmentioning

confidence: 99%

and

correspond to angular rate in x-axis they were named as x-masses, whereas

and

were named as y-masses, which corresponds to the angular rate in y-axis as shown in Figure 2 b,c, respectively.…”

Section: Mechanical Structure Of the Designed Gyroscopementioning

confidence: 99%

Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

2021

Self Cite

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“…Another approach is to use a single proof mass, which leads to a smaller device footprint but with worse performance. Consequently, tradeoffs have to be made between better performance and keeping the size of the device to a minimum [16][17][18].…”

Section: Introductionmentioning

confidence: 99%

A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation

2021

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The micro-electro-mechanical systems (MEMS)-based sensor technologies are considered to be the enabling factor for the future development of smart sensing applications, mainly due to their small size, low power consumption and relatively low cost. This paper presents a new structurally and thermally stable design of a resonant mode-matched electrostatic z-axis MEMS gyroscope considering the foundry constraints of relatively low cost and commercially available silicon-on-insulator multi-user MEMS processes (SOIMUMPs) microfabrication process. The novelty of the proposed MEMS gyroscope design lies in the implementation of two separate masses for the drive and sense axis using a unique mechanical spring configuration that allows minimizing the cross-axis coupling between the drive and sense modes. For frequency mismatch compensation between the drive and sense modes due to foundry process uncertainties and gyroscope operating temperature variations, a comb-drive-based electrostatic tuning is implemented in the proposed design. The performance of the MEMS gyroscope design is verified through a detailed coupled-field electric-structural-thermal finite element method (FEM)-based analysis.

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“…This operating principle has been used in several MEMS gyroscope implementations, whose layout complexity has increased during the recent decades [ 3 ] due to continuously increasing market requirements on device miniaturization and performance. In this regard, the most challenging layouts are indeed multi-axis ones: by employing several proof masses, suspended and coupled by different springs, such devices allow to detect external angular rates along multiple Cartesian axes with one single complex structure [ 4 , 5 , 6 , 7 , 8 ].…”

Section: Introductionmentioning

confidence: 99%

Rapid Prototyping of Inertial MEMS Devices through Structural Optimization

Giannini

Bonaccorsi

Braghin

2021

Sensors

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In this paper, we propose a novel design and optimization environment for inertial MEMS devices based on a computationally efficient schematization of the structure at the a device level. This allows us to obtain a flexible and efficient design optimization tool, particularly useful for rapid device prototyping. The presented design environment—feMEMSlite—handles the parametric generation of the structure geometry, the simulation of its dynamic behavior, and a gradient-based layout optimization. The methodology addresses the design of general inertial MEMS devices employing suspended proof masses, in which the focus is typically on the dynamics associated with the first vibration modes. In particular, the proposed design tool is tested on a triaxial beating-heart MEMS gyroscope, an industrially relevant and adequately complex example. The sensor layout is schematized by treating the proof masses as rigid bodies, discretizing flexural springs by Timoshenko beam finite elements, and accounting for electrostatic softening effects by additional negative spring constants. The MEMS device is then optimized according to two possible formulations of the optimization problem, including typical design requirements from the MEMS industry, with particular focus on the tuning of the structural eigenfrequencies and on the maximization of the response to external angular rates. The validity of the proposed approach is then assessed through a comparison with full FEM schematizations: rapidly prototyped layouts at the device level show a good performance when simulated with more complex models and therefore require only minor adjustments to accomplish the subsequent physical-level design.

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Single Drive Multi-Axis Gyroscope with High Dynamic Range, High Linearity and Wide Bandwidth

Cited by 14 publications

References 23 publications

Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation

Rapid Prototyping of Inertial MEMS Devices through Structural Optimization

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