A compact low-loss 4 4 arrayed waveguide grating (AWG) demultiplexer with a channel spacing of 400 GHz is presented. By employing a double-etch process, a low-loss device is made with deeply etched waveguides that have a bending radius down to 30 m. This small radius and a reduction of the number of array arms, reduces the device size to only 230 330 m 2. Measured insertion losses are less than 5 dB and the crosstalk is below 12 dB. To our knowledge, this is the smallest AWG reported to date.