2015
DOI: 10.1088/0022-3727/48/31/314001
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Silicon nanoparticle formation depending on the discharge conditions of an atmospheric radio-frequency driven microplasma with argon/silane/hydrogen gases

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Cited by 23 publications
(18 citation statements)
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“…Some typical types of APPs include dielectric barrier discharge (DBD), corona discharge, atmospheric pressure plasma jets (APPJs), and microplasmas. Various plasma excitation techniques can produce APPs with different gas temperatures and charge densities; the synergetic effects of a highly energetic plasma species and temperature can achieve versatile functions in material processing [3][4][5][6][7][8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…Some typical types of APPs include dielectric barrier discharge (DBD), corona discharge, atmospheric pressure plasma jets (APPJs), and microplasmas. Various plasma excitation techniques can produce APPs with different gas temperatures and charge densities; the synergetic effects of a highly energetic plasma species and temperature can achieve versatile functions in material processing [3][4][5][6][7][8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…Hence, the independent adjustment of the morphological and chemical film properties by variation of the process parameters at atmospheric pressure is a challenging task. Much of current effort is dedicated to this issue [4,5]. In particular, a stability against chemical or mechanical impact is desirable for coatings in a wide range of morphologies.…”
Section: Introductionmentioning
confidence: 99%
“…Nucleation, growth, and nanoparticle heating are mechanisms closely related in APPs. Although further confirmation will be required, nucleation in APPs appears to take place via super‐saturation of silicon atoms rather than through a polymerization process of SiH x radicals as observed in low‐pressure plasmas; this is partly supported by strong emission of atomic silicon lines in silane‐based APPs . Therefore full silane dissociation is necessary in APPs to achieve crystalline Si QDs.…”
Section: Photovoltaic Materials By Atmospheric Pressure Plasmasmentioning
confidence: 99%