Power modulated microwave plasma jet operating in argon at atmospheric pressure was studied by spatio-temporally resolved optical emission spectroscopy (OES) in order to clarify the influence of modulation on plasma parameters. OES was carried out in OH, NH, N 2 and + N 2 spectral regions using a spectrometer with intensified CCD detector synchronised with 10 1 -10 3 Hz sine modulating signal. A special software, able to fit even the overlapping spectra, was developed to batch process the massive datasets produced by this spatio-temporal study. Results show that studied species with the exception of + N 2 have balanced rotational and vibrational temperatures across the modulation frequencies. Significant influence of modulation can be clearly observed on temperature spatial gradients. Whereas for low modulation frequencies where the temperatures reach sharp maxima upon discharge tip, the high frequency modulation produces thermally homogeneous plasma.

The present investigation of cyclopropylamine (CPA) plasma polymerization in pulsed and continuous wave radio frequency (RF) discharges leads to the proposition of conditions at which amine-rich films exhibit a good stability in contact with water. The analyses reveal complex structure of CPA plasma polymers containing hydrocarbon chains, primary and secondary amines, nitriles and possibly imines. The decomposition of the monomer in plasma is progressing with the composite parameter W/F (RF power over monomer flow rate) but, in pulsed discharges, it is possible to deposit the films with N/C ratio above 0.24 using higher monomer flow rate. At the optimized monomer flow rate the 280 nm thick film exhibits only 20% thickness loss after 48 h immersion in water and still contains about 5 at% of the NH x environment.

The objective of this paper is to study the effect of magnetic field strength on spoke behaviour in a high power impulse magnetron sputtering discharge. In three magnetic field configurations, a broad range of experimental conditions was investigated by high-speed camera imaging. The dual image feature of the employed camera enabled us to determine the shape and spoke mode number, as well as the velocity of the spokes. Five distinct spoke shapes were detected. For each magnetic field, a map was created relating the occurrence of the spoke shape with the discharge conditions. Similarly, the spoke mode number, as well as the spoke velocity, was found to be strongly dependent on the discharge conditions. Based on the optical emission results, it was proposed that the trailing edge of the triangular spoke is related to the production of secondary electrons created by argon ions on the spoke edges, while in the case of a round spoke shape, the secondary electrons are mainly created by multiple charged titanium ions in the centre of the spoke.

A detailed experimental study of high power impulse magnetron sputtering processes is performed by time-resolved imaging of the ground state sputtered particles. New details related to the behavior of both neutral and singly ionized atoms are shown, as a result of separate treatment of the plasma-on and plasma-off time phases. In Paper I, the ion/neutral density redistribution in the ionization zone during sputtering is analyzed; the role of main discharge parameters, such as pulse repetition rate, pulse energy, etc., is discussed systematically. The time-resolved evolution of the ground state levels population for both sputtered neutrals and ions is also considered. In addition, propagation of the sputtered particles is analyzed using 2D density gradient diagrams calculated based on the measured particle density distributions. The results of this work are compared, when possible, to the data obtained previously [Britun et al., J. Appl. Phys. 117, 163302 (2015)].

The effects of amplitude modulation (AM) on an atmospheric pressure microwave argon jet is investigated using time-resolved optical emission spectroscopy, passive acoustic diagnostic and digital camera imaging. These techniques show significant changes of the effluent plasma properties with varying AM frequency. Operation in AM mode can enhance the plasma jet length or width over continuous-wave mode with the same mean power, which could be advantageous in many practical applications of plasma jets.

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The effects of amplitude modulation (AM) on an atmospheric pressure microwave argon jet is investigated using time-resolved optical emission spectroscopy, passive acoustic diagnostic and digital camera imaging. These techniques show significant changes of the effluent plasma properties with varying AM frequency. Operation in AM mode can enhance the plasma jet length or width over continuous-wave mode with the same mean power, which could be advantageous in many practical applications of plasma jets.