2015
DOI: 10.1063/1.4926962
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Silicon-based three-dimensional microstructures for radiation dosimetry in hadrontherapy

Abstract: In this work, we propose a solid-state-detector for use in radiation microdosimetry. This device improves the performance of existing dosimeters using customized 3D-cylindrical microstructures etched inside silicon. The microdosimeter consists of an array of micro-sensors that have 3Dcylindrical electrodes of 15 lm diameter and a depth of 5 lm within a silicon membrane, resulting in a well-defined micrometric radiation sensitive volume. These microdetectors have been characterized using an 241 Am source to ass… Show more

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Cited by 18 publications
(23 citation statements)
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“…The microdosimeter employed in this work is a new type of three dimensional diode designed and developed by IMB-CNM (CSIC) at their facilities in Barcelona, Spain (Guardiola, Quirion, Pellegrini, Fleta, Esteban, Cortés-Giraldo, Gómez, Solberg, Carabe & Lozano 2015). The detector is comprised of several individual sensors or unit cells arranged in an array capable of individual readout for the detection of energy deposition events.…”
Section: Silicon Microdosimetermentioning
confidence: 99%
“…The microdosimeter employed in this work is a new type of three dimensional diode designed and developed by IMB-CNM (CSIC) at their facilities in Barcelona, Spain (Guardiola, Quirion, Pellegrini, Fleta, Esteban, Cortés-Giraldo, Gómez, Solberg, Carabe & Lozano 2015). The detector is comprised of several individual sensors or unit cells arranged in an array capable of individual readout for the detection of energy deposition events.…”
Section: Silicon Microdosimetermentioning
confidence: 99%
“…Due to the non-tissue equivalent nature of silicon, corrections must be made for effective extraction of dose parameters [ 8 ]. Over the years, since the first publication on silicon microdosimeters, there have been continuous improvements in the design, structure and efficiency [ 9 , 10 , 11 , 12 , 13 ]. Due to the limitations of silicon-based microdosimeters, further developments in the portability and efficiency of the TEPCs are also being considered.…”
Section: Introductionmentioning
confidence: 99%
“…The first one belongs to the U3DTHIN architecture [35,37,50,[57][58][59]. On the basis of the preliminary results with U3DTHIN detectors, a novel architecture based on 3D-cylindrical microstructures was proposed and specifically developed for microdosimetry in hadron therapy [32][33][34]36,[38][39][40][41].…”
Section: Silicon-based 3d Microdosimetersmentioning
confidence: 99%
“…For this purpose, we designed and fabricated novel radiation detectors with both 3D and 3D-cylindrical architectures, which were etched inside the silicon bulk in the National Center of Microelectronics (IMB-CNM, CSIC, Spain). These 3D microstructures were specifically customized for microdosimetry in PT and they overcame some of the technological challenges in this domain, namely the low noise capability, well-defined sensitive volume, high spatial resolution, and pile-up robustness [32][33][34][35][36][37][38][39][40][41]. Both architectures reduce the loss of charge carriers due to trapping effects, the charge collection time, and the voltage required for full depletion compared to planar silicon detectors.…”
Section: Introductionmentioning
confidence: 99%