2020
DOI: 10.3390/mi11121053
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Silicon 3D Microdetectors for Microdosimetry in Hadron Therapy

Abstract: The present overview describes the evolution of new microdosimeters developed in the National Microelectronics Center in Spain (IMB-CNM, CSIC), ranging from the first ultra-thin 3D diodes (U3DTHINs) to the advanced 3D-cylindrical microdetectors, which have been developed over the last 10 years. In this work, we summarize the design, main manufacture processes, and electrical characterization of these devices. These sensors were specifically customized for use in particle therapy and overcame some of the techno… Show more

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Cited by 17 publications
(17 citation statements)
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“…Additionally, no differences in the spectra were found due to potential radiation damage when same measurements were repeated, although further studies are planned to determine the average life of these devices working under common particle accelerator intensities. Furthermore, with our 3D architecture, the capacitance is two orders of magnitude lower than a planar sensor of the same thickness 37 , which improves the overall signal-to-noise ratio.…”
Section: Discussionmentioning
confidence: 96%
See 1 more Smart Citation
“…Additionally, no differences in the spectra were found due to potential radiation damage when same measurements were repeated, although further studies are planned to determine the average life of these devices working under common particle accelerator intensities. Furthermore, with our 3D architecture, the capacitance is two orders of magnitude lower than a planar sensor of the same thickness 37 , which improves the overall signal-to-noise ratio.…”
Section: Discussionmentioning
confidence: 96%
“…Thickness values were carefully quantified during the manufacturing process with an optical method (reflectometry with NanoSpec 6100) and at the end of fabrication processes with the focused ion beam technique. More information about the fabrication process has been already reported in the literature 29,30,33,37 .…”
Section: Methodsmentioning
confidence: 99%
“…Thickness values were carefully quantified during the manufacturing process with an optical method (reflectometry with NanoSpec 6100) and at the end of fabrication processes with the focused ion beam technique. More information about the fabrication process has been already reported in the literature 42 , 43 , 46 , 50 .…”
Section: Methodsmentioning
confidence: 99%
“…In practice, when it is mandatory to provide a dose verification in real time, the films are complemented with active radiation sensors as semiconductor or scintillation detectors, gas chambers, i.a. 19 22 .…”
Section: Introductionmentioning
confidence: 99%