Sensitivity improvement of a microcantilever based mass sensor

Narducci, Margarita; Figueras, E.; López, María José; Grícia, Isabel; Santander, J.; Ivanov, P.; Fonseca, L.; Cané, C.

doi:10.1016/j.mee.2009.01.022

Cited by 41 publications

(21 citation statements)

References 4 publications

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“…For higher sensitivity, the use of higher-order resonance modes and the reduction of device dimensions have been discussed. 40 Recent approaches have been developed to achieve attogram (10 À18 g) level mass sensing, by using suspended micro-channel resonators 41 or integrated electronic displacement transducers. 42 While MEMS/NEMS sensors monitoring linear resonant frequencies continues to be studied, sensing techniques using nonlinear features have gained attention in various studies, such as ones focused on electrostatic nonlinear forcing, 43 parametric resonances, 44,45 or nonlinear modal interactions.…”

Section: Introductionmentioning

confidence: 99%

Exploiting Delayed Nonlinear Feedback for Sensing Based on Bifurcation Morphing

Lim

Epureanu

2011

Int. J. Str. Stab. Dyn.

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Bifurcation morphing created by means of nonlinear feedback excitation is a vibration-based method for sensing. In this work, several new studies are presented to connect previously demonstrated theory to increasingly more practical applications. In particular, in the process of designing nonlinear feedback auxiliary signals, time delays in the circuitry are unavoidable. Advantages as well as possible side e®ects and disadvantages of time delays are discussed. Furthermore, additional time delay is considered as a new design parameter. Increasing the time delay has advantages such as enhanced robustness and sensitivity, which are demonstrated computationally. Moreover, calibration using multiple sensor locations is discussed. A clampedfree cantilever beam structure is modeled and used for computational validation. The beam model resembles cantilever-based resonant sensor systems. Thus, potential applications of the new algorithm are discussed and the results stress the importance of nonlinear features for enhancing sensing performance in mechanical sensors without structural modi¯cations.

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Section: Introductionmentioning

confidence: 99%

Exploiting Delayed Nonlinear Feedback for Sensing Based on Bifurcation Morphing

Lim

Epureanu

2011

Int. J. Str. Stab. Dyn.

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“…The sensitivity of the cantilever mass sensors could be enhanced by using higher order frequency modes and by reducing the size of the cantilever as reported by Narducci et al [12]. Moreover, controlling the damping rate and the frequency ratio for excited cantilevers can enhance the sensitivity of the mechanical resonator [13].…”

Section: Introductionmentioning

confidence: 90%

Modeling the material structure and couple stress effects of nanocrystalline silicon beams for pull-in and bio-mass sensing applications

Shaat

Abdelkefi

2015

International Journal of Mechanical Sciences

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“…The authors suggested triangular or step cross-section profiles instead the conventional rectangular one. Another solution, proposed by M. Narducci et al [19], consisted of reducing the microcantilever size (increasing k and reducing meff) and/or using higher-order modes. In the case of end-mass loading, S. Morshed et al [20] have demonstrated via simulation studies that structures with high aspect ratio (length-to-width) are more sensitive to local end-mass variation; furthermore, they have suggested the use of a triangular microcantilever shape to enhance the stiffness and minimize the effective mass at the free-end of the structure.…”

Section: Introductionmentioning

confidence: 99%

Geometry optimization of uncoated silicon microcantilever-based gas density sensors

Boudjiet

Bertrand

Mathieu

et al. 2015

Sensors and Actuators B: Chemical

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Abstract:In the absence of coating, the only way to improve the sensitivity of silicon microcantilever-based density sensors is to optimize the device geometry. Based on this idea, several microcantilevers with different shapes (rectangular-, U-and T-shaped microstructures) and dimensions have been fabricated and tested in the presence of hydrogen/ nitrogen mixtures (H2/N2) of various concentrations ranging from 0.2% to 2%. In fact, it is demonstrated that wide and short rectangular cantilevers are more sensitive to gas density changes than U-and T-shaped devices of the same overall dimensions, and that the thickness doesn't affect the sensitivity despite the fact that it affects the resonant frequency. Moreover, because of the phase linearization method used for the natural frequency estimation, detection of a gas mass density change of 2 mg/l has been achieved with all three microstructures. In addition, noise measurements have been used to estimate a limit of detection of 0.11 mg/l for the gas mass density variation (corresponding to a concentration of 100 ppm of H2 in N2), which is much smaller than the current state of the art for uncoated mechanical resonators.

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Sensitivity improvement of a microcantilever based mass sensor

Cited by 41 publications

References 4 publications

Exploiting Delayed Nonlinear Feedback for Sensing Based on Bifurcation Morphing

Exploiting Delayed Nonlinear Feedback for Sensing Based on Bifurcation Morphing

Modeling the material structure and couple stress effects of nanocrystalline silicon beams for pull-in and bio-mass sensing applications

Geometry optimization of uncoated silicon microcantilever-based gas density sensors

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