Scanning acoustic force microscopy characterization of thermal expansion effects on the electromechanical properties of film bulk acoustic resonators

Paulo, Álvaro San; Liu, X.; Bokor, J.

doi:10.1063/1.1866508

Cited by 7 publications

(3 citation statements)

References 12 publications

(18 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Figure 2a shows the simulation result of a 2.44 GHz FBAR’s oscillation with input powers of 10 dBm, 5 dBm, 0 dBm and −5 dBm, and the simulated color patterns indicate the distribution of oscillation amplitude at resonance. Obviously, the amplitude is larger in the central region of the resonator, which is due to the boundary condition of zero displacement as previously described 49 , 50 . Figure 2b summarizes the maximum oscillation amplitudes of FBAR’s resonance at four input powers.…”

Section: Resultsmentioning

confidence: 68%

Investigation of sorptive interactions between volatile organic compounds and supramolecules at dynamic oscillation using bulk acoustic wave resonator virtual sensor arrays

Wang,

Zhao,

Jin

et al. 2024

Microsyst Nanoeng

View full text Add to dashboard Cite

Supramolecules are considered as promising materials for volatile organic compounds (VOCs) sensing applications. The proper understanding of the sorption process taking place in host-guest interactions is critical in improving the pattern recognition of supramolecules-based sensing arrays. Here, we report a novel approach to investigate the dynamic host-guest recognition process by employing a bulk acoustic wave (BAW) resonator capable of producing multiple oscillation amplitudes and simultaneously recording multiple responses to VOCs. Self-assembled monolayers (SAMs) of β-cyclodextrin (β-CD) were modified on four BAW sensors to demonstrate the gas-surface interactions regarding oscillation amplitude and SAM length. Based on the method, a virtual sensor array (VSA) type electronic nose (e-nose) can be realized by pattern recognition of multiple responses at different oscillation amplitudes of a single sensor. VOCs analysis was realized respectively by using principal component analysis (PCA) for individual VOC identification and linear discriminant analysis (LDA) for VOCs mixtures classification.

show abstract

Section: Resultsmentioning

confidence: 68%

Investigation of sorptive interactions between volatile organic compounds and supramolecules at dynamic oscillation using bulk acoustic wave resonator virtual sensor arrays

Wang,

Zhao,

Jin

et al. 2024

Microsyst Nanoeng

View full text Add to dashboard Cite

show abstract

“…One example is the use of atomic force microscopy (AFM) to characterize surface vibrations [44][45][46][47]. It cannot be considered as a truly non-contact method, as it can significantly influence the sample under study [48], although techniques have been developed to minimize the effect [49].…”

Section: Optical Characterization Of Surface Vibrationsmentioning

confidence: 99%

Measurement of evanescent wave properties of a bulk acoustic wave resonator [Letters]

Kokkonen

Meltaus

Pensala

et al. 2012

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

View full text Add to dashboard Cite

Aalto University publication series DOCTORAL DISSERTATIONS 112/2014 © Kimmo Kokkonen AbstractThe research summarized in this dissertation focuses on the development of a heterodyne scanning laser interferometer and of data-analysis techniques for the characterization and analysis of the surface vibration fields in microacoustic devices and test structures.The heterodyne laser interferometer enables a phase-sensitive, absolute-amplitude detection of the out-of-plane component of a surface vibration field, with a minimum detectable amplitude of less than a picometer, while the lateral resolution is better than 1 micrometer. The instrument features a flat frequency response up to 6 GHz.The phase-sensitive absolute-amplitude data enables the visualization of the actual wave behavior in electromechanical components and test structures, but more importantly, it is the basis for further analysis. The research instrument is applied to the study of electroacoustic devices based on surface acoustic wave (SAW) and bulk acoustic wave (BAW) technologies. Two novel SAW devices are studied in detail: a phononic crystal (PnC) structure and a scattering structure resulting in a random wave field. PnCs are acoustic metamaterials that can provide engineered material properties. The laser interferometric measurements were amongst the first to directly characterize the wave interaction with the PnC. SAW slowness curves of an anisotropic substrate material are extracted by measuring and analyzing the scattered random wave field. Data analysis methods are developed further in the context of BAW research by experimentally addressing two important aspects of device design: the correct operation of the acoustic reflector used to confine the energy in the resonator, and investigation of the role of the dispersion and standing wave resonances to the spurious responses often observed in high-Q resonators. Fourier transform techniques are used for selective visualization of wave fields and for the extraction of the dispersion characteristics of the plate-waves. The dispersion data are then further used to analyze the transfer characteristics of an acoustic reflector and to study the properties of lateral eigenresonances and the lateral energy confinement in detail.The research described in this thesis provides a detailed characterization of the operation of SAW and BAW devices and effects within, highlighting and further developing the experimental characterization capabilities and data-analysis methods.Keywords laser interferometry, microacoustics, surface acoustic waves, bulk acoustic waves Tiivistelmä Väitöskirjatyö käsittelee heterodyne-tyyppisen laserinterferometrin sekä interferometrin tuottaman datan analyysitekniikoiden kehittämistä pintavärähtelykenttien karakterisoimiseksi ja analysoimiseksi mikroakustisissa komponenteissa ja testirakenteissa.Työssä rakennettu heterodynelaserinterferometri mahdollistaa pintavärähtelyiden vaiheherkät absoluuttiamplitudimittaukset aina 6 GHz taajuuteen asti. Laitteisto kykenee värähtely-kenttien k...

show abstract

“…Thermomechanical effects on AFM imaging of FBAR resonators were described in a previous work. 17 Briefly, when a rf driving signal is applied to the FBAR, part of the energy is absorbed by the membrane and converted into heat. As a result, the membrane undergoes a thermal expansion proportional to the temperature.…”

mentioning

confidence: 99%

Detection of nanomechanical vibrations by dynamic force microscopy in higher cantilever eigenmodes

Paulo

Black

White

et al. 2007

Applied Physics Letters

View full text Add to dashboard Cite

The authors present a method based on dynamic force microscopy to characterize subnanometer-scale mechanical vibrations in resonant micro-and nanoelectromechanical systems. The method simultaneously employs the first eigenmode of the microscope cantilever for topography imaging and the second eigenmode for the detection of the resonator vibration. Here, they apply this scheme for the characterization of a 1.6 GHz film bulk acoustic resonator, showing that it overcomes the main limitations of acoustic imaging in contact-mode atomic force microscopy. The method provides nanometer-scale lateral resolution on arbitrarily high resonant frequency systems, which makes it applicable to a wide diversity of electromechanical systems.

show abstract

Scanning acoustic force microscopy characterization of thermal expansion effects on the electromechanical properties of film bulk acoustic resonators

Cited by 7 publications

References 12 publications

Investigation of sorptive interactions between volatile organic compounds and supramolecules at dynamic oscillation using bulk acoustic wave resonator virtual sensor arrays

Investigation of sorptive interactions between volatile organic compounds and supramolecules at dynamic oscillation using bulk acoustic wave resonator virtual sensor arrays

Measurement of evanescent wave properties of a bulk acoustic wave resonator [Letters]

Detection of nanomechanical vibrations by dynamic force microscopy in higher cantilever eigenmodes

Contact Info

Product

Resources

About