We describe a scanning heterodyne interferometer for imaging surface vibrations with a wide frequency range, with current electronics, up to 6GHz. The heterodyne operation facilitates measurement of absolute amplitude and phase of the surface vibration without calibration. Currently, the setup allows detection of vibration amplitudes down to ∼1pm with a lateral resolution of <1μm. The interferometer is designed to accommodate the different sample types, e.g., surface and bulk acoustic wave devices and micromechanical resonators. The absolute-amplitude and phase information allows for a thorough characterization of surface vibrations in such components and provides direct information of the vibration fields not obtainable via electrical measurements.

Benchabane, S.; Gaiffe, O.; Salut, R.; Ulliac, G.; Laude, V.; Kokkonen, Kimmo Guidance of surface waves in a micron-scale phononic crystal line-defect waveguide

International audienceSurface acoustic wave propagation within a two-dimensional phononic band gap structure has been studied using a heterodyne laser interferometer. Acoustic waves are launched by interdigital transducers towards a square lattice of holes etched in a piezoelectric medium. Interferometer measurements performed at frequencies lying below, within, and above the expected band gap frequency range provide direct information of the wave interaction with the phononic crystal, revealing anisotropic scattering into higher diffraction orders depending on the apparent grating pitch at the boundary between the phononic crystal and free surface. Furthermore, the measurements also confirm the existence of an elastic band gap, in accordance with previous electrical measurements and theoretical predictions

We describe a LED-based stroboscopic white-light interferometer and a data analysis method that allow mapping out-of-plane surface vibration fields in electrically excited microstructures with sub-nm amplitude resolution for vibration frequencies ranging up to tens of MHz. The data analysis, which is performed entirely in the frequency domain, makes use of the high resolution available in the measured interferometric phase data. For demonstration, we image the surface vibration fields in a square-plate silicon MEMS resonator for three vibration modes ranging in frequency between 3 and 14 MHz. The minimum detectable vibration amplitude in this case was less than 100 pm.