Detection of nanomechanical vibrations by dynamic force microscopy in higher cantilever eigenmodes

Paulo, Álvaro San; Black, J.P.; White, Richard M.; Bokor, Jeffrey

doi:10.1063/1.2767764

Cited by 19 publications

(19 citation statements)

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“…One example is the use of atomic force microscopy (AFM) to characterize surface vibrations [44][45][46][47]. It cannot be considered as a truly non-contact method, as it can significantly influence the sample under study [48], although techniques have been developed to minimize the effect [49]. In fact, many of the available microscopy techniques, such as scanning electron microscopy (SEM) [50], have been adapted to study also surface vibrations.…”

Section: Optical Characterization Of Surface Vibrationsmentioning

confidence: 99%

Measurement of evanescent wave properties of a bulk acoustic wave resonator [Letters]

Kokkonen

Meltaus

Pensala

et al. 2012

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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Aalto University publication series DOCTORAL DISSERTATIONS 112/2014 © Kimmo Kokkonen AbstractThe research summarized in this dissertation focuses on the development of a heterodyne scanning laser interferometer and of data-analysis techniques for the characterization and analysis of the surface vibration fields in microacoustic devices and test structures.The heterodyne laser interferometer enables a phase-sensitive, absolute-amplitude detection of the out-of-plane component of a surface vibration field, with a minimum detectable amplitude of less than a picometer, while the lateral resolution is better than 1 micrometer. The instrument features a flat frequency response up to 6 GHz.The phase-sensitive absolute-amplitude data enables the visualization of the actual wave behavior in electromechanical components and test structures, but more importantly, it is the basis for further analysis. The research instrument is applied to the study of electroacoustic devices based on surface acoustic wave (SAW) and bulk acoustic wave (BAW) technologies. Two novel SAW devices are studied in detail: a phononic crystal (PnC) structure and a scattering structure resulting in a random wave field. PnCs are acoustic metamaterials that can provide engineered material properties. The laser interferometric measurements were amongst the first to directly characterize the wave interaction with the PnC. SAW slowness curves of an anisotropic substrate material are extracted by measuring and analyzing the scattered random wave field. Data analysis methods are developed further in the context of BAW research by experimentally addressing two important aspects of device design: the correct operation of the acoustic reflector used to confine the energy in the resonator, and investigation of the role of the dispersion and standing wave resonances to the spurious responses often observed in high-Q resonators. Fourier transform techniques are used for selective visualization of wave fields and for the extraction of the dispersion characteristics of the plate-waves. The dispersion data are then further used to analyze the transfer characteristics of an acoustic reflector and to study the properties of lateral eigenresonances and the lateral energy confinement in detail.The research described in this thesis provides a detailed characterization of the operation of SAW and BAW devices and effects within, highlighting and further developing the experimental characterization capabilities and data-analysis methods.Keywords laser interferometry, microacoustics, surface acoustic waves, bulk acoustic waves Tiivistelmä Väitöskirjatyö käsittelee heterodyne-tyyppisen laserinterferometrin sekä interferometrin tuottaman datan analyysitekniikoiden kehittämistä pintavärähtelykenttien karakterisoimiseksi ja analysoimiseksi mikroakustisissa komponenteissa ja testirakenteissa.Työssä rakennettu heterodynelaserinterferometri mahdollistaa pintavärähtelyiden vaiheherkät absoluuttiamplitudimittaukset aina 6 GHz taajuuteen asti. Laitteisto kykenee värähtely-kenttien k...

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Section: Optical Characterization Of Surface Vibrationsmentioning

confidence: 99%

Measurement of evanescent wave properties of a bulk acoustic wave resonator [Letters]

Kokkonen

Meltaus

Pensala

et al. 2012

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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“…An AFM cantilever is brought in close proximity of the resonator to probe its oscillations. Several groups have used contact interactions [11][12][13]; tapping mode AFM has also been employed for less intrusive probing [14][15][16]. In addition, other AFMbased approaches, including acoustic force microscopy [17] and electrostatic scanning probe microscopy [18], have also been applied to measuring small oscillations.…”

mentioning

confidence: 99%

Dynamic interactions between oscillating cantilevers: Nanomechanical modulation using surface forces

Basarir

Ekinci

2013

Applied Physics Letters

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Dynamic interactions between two oscillating micromechanical cantilevers are studied. In the experiment, the tip of a high-frequency cantilever is positioned near the surface of a second lowfrequency cantilever. Due to the highly nonlinear interaction forces between the two surfaces, thermal oscillations of the low-frequency cantilever modulate the driven oscillations of the highfrequency cantilever. The dissipations and the frequencies of the two cantilevers are shown to be coupled, and a simple model for the interactions is presented. The interactions studied here may be useful for the design of future micro and nanoelectromechanical systems for mechanical signal processing; they may also help realize coupled mechanical modes for experiments in non-linear dynamics. [6,7]. Miniaturized mechanical devicesHere, we study dynamic interactions between two oscillating micromechanical cantilevers and harvest these interactions for mechanical signal modulation and detection. In the experiment, the carrier signal from a high-frequency microcantilever oscillator is modulated by low-frequency thermal oscillations of a second microcantilever by simply bringing the two microcantilevers close together. The approach relies upon the strong inherent nonlinearity of the interaction force between two surfaces in close proximity and offers several advantages. The modulation is purely mechanical, and mechanical signals need not be converted to electrical signals. The strength of the coupling between the two mechanical signals, and hence the modulation index, can be adjusted by changing the distance between the two microcantilevers. Conservative and dissipative components of the interaction enable tuning of the frequencies and dissipation. Conversely, monitoring the modulation on the carrier signal allows for sensitive mechanical displacement detection. Because the approach offers prospects for creating coupled mechanical modes [10] with tunable coupling, it may be useful in fundamental investigations in nonlinear dynamics.Our approach is derived from dynamic mode atomic force microscopy (AFM). Related to our work here, various AFM modalities have been used to detect the motion of micro-and nano-mechanical resonators. In these

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“…HFM monitors the cantilever vibration at the beat frequency in amplitude and phase. As has been demonstrated, Phase-HFM provides information about dynamic relaxation processes related to adhesion hysteresis at nanoscale contacts with high time sensitivity [28]. Recently, Scanning Near-Field Ultrasound Holography (SNFUH) [30] has been introduced.…”

Section: Ultrasonic Atomic Force Microscopiesmentioning

confidence: 99%

“…Recently, the possibility to detect high-frequency vibration using dynamic force microscopy has been demonstrated [28]; the detection of acoustic vibration in this case is apparently also facilitated because of the activation of the mechanical diode effect (see Sect. 3.2.1 for further discussions).…”

Section: Ultrasonic Atomic Force Microscopiesmentioning

confidence: 99%

“…This is a new method for the study of shear elasticity, viscoelasticity, and tribological properties on the nanoscale. Section 3.4 discusses the technique of Heterodyne Force Microscopy [28]. HFM provides a novel and very interesting procedure to take advantage of the time resolution inherent in high-frequency actuation.…”

Section: Ultrasonic Atomic Force Microscopiesmentioning

confidence: 99%

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Mechanical Diode-Based Ultrasonic Atomic Force Microscopies

Cuberes¹

Applied Scanning Probe Methods XI

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Abstract. Recent advances in mechanical diode-based ultrasonic force microscopy techniques are reviewed. The potential of Ultrasonic Force Microscopy (UFM) for the study of material elastic properties is explained in detail. Advantages of the application of UFM in nanofabrication are discussed. Mechanical-Diode Ultrasonic Friction Force Microscopy (MD-UFFM) is introduced, and compared with Lateral Acoustic Force Microscopy (LAFM) and Torsional Resonance (TR) -Atomic Force Microscopy (AFM). MD-UFFM provides a new method for the study of shear elasticity, viscoelasticity, and tribological properties on the nanoscale. The excitation of beats at nanocontacts and the implementation of Heterodyne Force Microscopy (HFM) are described. HFM introduces a very interesting procedure to take advantage of the time resolution inherent in high-frequency actuation.

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Detection of nanomechanical vibrations by dynamic force microscopy in higher cantilever eigenmodes

Cited by 19 publications

References 20 publications

Measurement of evanescent wave properties of a bulk acoustic wave resonator [Letters]

Measurement of evanescent wave properties of a bulk acoustic wave resonator [Letters]

Dynamic interactions between oscillating cantilevers: Nanomechanical modulation using surface forces

Mechanical Diode-Based Ultrasonic Atomic Force Microscopies

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