Roll‐to‐Roll Vacuum Deposition of Barrier Coatings

Bishop, Charles A.

doi:10.1002/9781118946183

Cited by 17 publications

(17 citation statements)

References 5 publications

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“…12 Polymers can have both amorphous and denser crystalline regions, residual stresses from the extrusion filmforming process, particulates from unreacted oligomers, and other film debris, which can originate from functional film additives. 13 In fact, the surface chemistries of the two sides of a polyester film, such as polyethylene terephthalate (PET), a leading substrate candidate for flexible electronics, are different. One side is "bare" polymer, while the other side is commonly coated to facilitate winding and unwinding.…”

Section: Introductionmentioning

confidence: 99%

Effect of early stage growth on moisture permeation of thin-film Al2O3 grown by atomic layer deposition on polymers

Carcia

McLean

Walls

et al. 2013

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Articles you may be interested inAl2O3 multi-density layer structure as a moisture permeation barrier deposited by radio frequency remote plasma atomic layer deposition J. Appl. Phys. 115, 073502 (2014); 10.1063/1.4866001Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al2O3 films deposited by remote plasma atomic layer deposition Blistering of atomic layer deposition Al2O3 layers grown on silicon and its effect on metal-insulator-semiconductor structures J. Vac. Sci. Technol. A 31, 01A128 (2013); 10.1116/1.4768170 Permeability and corrosion in ZrO2/Al2O3 nanolaminate and Al2O3 thin films grown by atomic layer deposition on polymersThe authors investigated moisture permeation for Al 2 O 3 barrier films grown by atomic layer deposition (ALD) on the two individual chemically distinct surfaces of a commercial (DuPont Teijin Films, Chester, VA) polyethylene terephthalate (PET) film. One surface is "bare" PET polymer, whereas the opposite surface is coated with a low friction "slip" layer to facilitate winding and unwinding of the polymer film on a roll. For early stage Al 2 O 3 film growth (<8 nm), the authors found that moisture permeation was less on the bare polymer side than the slip side but converged to same instrument limited value ($1 Â 10 À4 g H 2 O/m 2 day) for thicker films. However, thicker barrier films grown on the slip side experienced abrupt permeation breakthrough in longerterm Ca-testing at 60 C/85% RH, whereas equivalently grown barrier films on the bare PET-side were stable. Mildly etching the slip side in Ar, before depositing Al 2 O 3 , resulted in permeation performance equivalent to barriers grown on the bare polymer side. The authors present evidence that the etch pretreatment reduced incorporation of hydroxide during early stage growth of Al 2 O 3 by ALD, and this was critical for long-term, stable, low moisture permeation barrier films.

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Section: Introductionmentioning

confidence: 99%

Effect of early stage growth on moisture permeation of thin-film Al2O3 grown by atomic layer deposition on polymers

Carcia

McLean

Walls

et al. 2013

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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show abstract

“…Increasing the number of stacks should enhance the probability of the defect filling effect, even though the thickness of each Al 2 O 3 layer is reduced. A bending test was performed according to ASTM D522-93a, in order to examine the flexibility of the sample [23]. The 5-stack Al 2 O 3 /ZrO 2 multilayer sample underwent 5000-time cyclic bending around the radius of 2 cm.…”

Section: Resultsmentioning

confidence: 99%

Defect-sealing of Al2O3/ZrO2 multilayer for barrier coating by plasma-enhanced atomic layer deposition process

Lee

Kim

2015

Thin Solid Films

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“…Plasma treatment of polymer surfaces prior to PVD or CVD deposition is a common initial processing step used to improve film nucleation and adhesion (48). Plasma treatment of polymer surfaces prior to PVD or CVD deposition is a common initial processing step used to improve film nucleation and adhesion (48).…”

Section: Effect Of Plasma Pretreatment Of Plastic Substrate ( 21)mentioning

confidence: 99%

“…For example, one side of PET is commonly coated with a 'slip' layer to reduce the coefficient of friction to facilitate winding and unwinding the film (48). For example, one side of PET is commonly coated with a 'slip' layer to reduce the coefficient of friction to facilitate winding and unwinding the film (48).…”

Section: Effect Of Substrate Surface Chemistry ( 21)mentioning

confidence: 99%

Thin-Film Diffusion Barriers for Electronic Applications

Carcia

2014

Comprehensive Materials Processing

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Roll‐to‐Roll Vacuum Deposition of Barrier Coatings

Cited by 17 publications

References 5 publications

Effect of early stage growth on moisture permeation of thin-film Al2O3 grown by atomic layer deposition on polymers

Effect of early stage growth on moisture permeation of thin-film Al2O3 grown by atomic layer deposition on polymers

Defect-sealing of Al2O3/ZrO2 multilayer for barrier coating by plasma-enhanced atomic layer deposition process

Thin-Film Diffusion Barriers for Electronic Applications

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