Comprehensive Materials Processing 2014
DOI: 10.1016/b978-0-08-096532-1.00420-9
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Thin-Film Diffusion Barriers for Electronic Applications

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“…These issues require long-term experimental studies that combine the efforts of large teams of chemists and engineers, as well as the use of various laboratory equipment. In this situation, the use of theoretical models describing mass transfer through multilayer hybrid polymeric media [6,[39][40][41][42] can significantly reduce the overall duration of the development process. However, building adequate theoretical models is a nontrivial problem, since it is necessary to consider the structure of each polymer, the inorganic fillers, the entire barrier material, and the properties of the interactions of all components with the molecules of penetrating gases.…”
Section: Introductionmentioning
confidence: 99%
“…These issues require long-term experimental studies that combine the efforts of large teams of chemists and engineers, as well as the use of various laboratory equipment. In this situation, the use of theoretical models describing mass transfer through multilayer hybrid polymeric media [6,[39][40][41][42] can significantly reduce the overall duration of the development process. However, building adequate theoretical models is a nontrivial problem, since it is necessary to consider the structure of each polymer, the inorganic fillers, the entire barrier material, and the properties of the interactions of all components with the molecules of penetrating gases.…”
Section: Introductionmentioning
confidence: 99%