RF MEMS filter based on dual liquid variations

Abstract

This paper discusses the behavior of RF MEMS tunable microwave filter. We have modeled the distribution of magnetic field and electric current density in order to reveal the comportment of each device and to evaluate the relation between the frequency response and the microwave performances. From several modelling and simulations, we catch the resonance phenomenon for magnetic and electric fields at different conditions. Hence, in order to develop a reconfigurable MEMS ensuring a function of tunable band-pass filters, we have identified conditions allowing to vary the resonance frequency from Fres = 0.42 GHz to Fres = 1.85 GHz ensuring a large total variation of Tr = 340.5%. The structure is fabricated using SU-8 resin for circulating microchannels and sealing layers. The extracted parameters from measurements results and retro-simulation reveal a diminution of the total tuning range.

Performance Evaluation of Microfluidically Tunable Microwave Filters

“…Figure 16 presents two fabricated microfluidically tunable microwave filters. The first associates the inductor and the capacitor in serial topology and behave as a pass-band filter studied in previous work [22]. The second one is a stop-band filter and is analyzed in the paragraphs above.…”

Tunable RF MEMS Inductors for Two-Frequency Bands

“…Integrated inductors are essential components in modern RF circuits and have been studied in several recent works, [1], [2], [3], [4], [5]. In the early development of variable inductors, switchable inductors were the first design choice as a means of varying inductance values.…”