RF MEMS variable attenuators with improved dB-linearity

Hah, Dooyoung

doi:10.1007/s00542-023-05427-8

Cited by 4 publications

(2 citation statements)

References 31 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Reconfigurability, broadband behavior, and good linearity represent the most sought-after features of RF MEMS attenuators. Within this context, research effort has been put into increasing the number of attenuation states, while maintaining a flat and stable impedance value across a broad spectrum of frequencies and a minimal error as compared to the desired attenuation level [29].…”

Section: Introductionmentioning

confidence: 99%

Discussion and Demonstration of RF-MEMS Attenuators Design Concepts and Modules for Advanced Beamforming in the Beyond-5G and 6G Scenario—Part 1

Tagliapietra,

Giacomozzi,

Michelini

et al. 2024

Sensors

View full text Add to dashboard Cite

This paper describes different variants of broadband and simple attenuator modules for beamforming applications, based on radio frequency micro electro-mechanical systems (RF-MEMS), framed within coplanar waveguide (CPW) structures. The modules proposed in the first part of this work differ in their actuation voltage, topology, and desired attenuation level. Fabricated samples of basic 1-bit attenuation modules, characterized by a moderate footprint of 690 × 1350 µm2 and aiming at attenuation levels of −2, −3, and −5 dB in the 24.25–27.5 GHz range, are presented in their variants featuring both low actuation voltages (5–9 V) as well as higher values (~45 V), the latter ones ensuring larger mechanical restoring force (and robustness against stiction). Beyond the fabrication non-idealities that affected the described samples, the substantial agreement between simulations and measurement outcomes proved that the proposed designs could provide precise attenuation levels up to 40 GHz, ranging up to nearly −3 dB and −5 dB for the series and shunt variants, respectively. Moreover, they could be effective building blocks for future wideband and reconfigurable RF-MEMS attenuators. In fact, in the second part of this work, combinations of the discussed cells and other configurations meant for larger attenuation levels are investigated.

show abstract

Section: Introductionmentioning

confidence: 99%

Discussion and Demonstration of RF-MEMS Attenuators Design Concepts and Modules for Advanced Beamforming in the Beyond-5G and 6G Scenario—Part 1

Tagliapietra,

Giacomozzi,

Michelini

et al. 2024

Sensors

View full text Add to dashboard Cite

show abstract

“…Digital [24] and analog [16] architectures have been explored for the developed RF-MEMS attenuators, with digital being the predominant choice [25]. Key sought-after attributes for these devices include reconfigurability, broadband performance, and excellent linearity [26]. Efforts in research have focused on expanding the range of attenuation levels while ensuring consistent impedance characteristics across various frequencies and minimal deviation from the desired attenuation level.…”

Section: Introductionmentioning

confidence: 99%

Discussion and Demonstration of RF-MEMS Attenuators Design Concepts and Modules for Advanced Beamforming in the Beyond-5G and 6G Scenario—Part 2

Tagliapietra,

Giacomozzi,

Michelini

et al. 2024

Preprint

View full text Add to dashboard Cite

In this paper, different concepts of reconfigurable RF-MEMS attenuators for beamforming applications are proposed and critically assessed. Capitalizing on the previous part of this work, the 1-bit attenuation modules featuring series and shunt resistors and low-voltage membranes (7-9 V) are employed to develop a 3-bit attenuator for fine-tuning attenuations (&lt; -10 dB) in the 24.25-27.5 GHz range. More substantial attenuation levels are investigated by means of fabricated samples of coplanar waveguide (CPW) sections equipped with Pi-shaped resistors aiming at attenuations of -15, -30, and -45 dB. The remarkable electrical features of such configurations, showing flat attenuation curves and limited return losses, and the investigation of a switched-line attenuator design based on them led to the final proposed concept of a low-voltage 24-state attenuator. Such simulated device combines the Pi-shaped resistors for substantial attenuations with the 3-bit design for fine-tuning operations, showing a maximum attenuation level of nearly -50 dB while maintaining steadily flat attenuation levels and limited return losses (< -11 dB) along the frequency band of interest.

show abstract

Discussion and Demonstration of RF-MEMS Attenuators Design Concepts and Modules for Advanced Beamforming in the Beyond-5G and 6G scenario – Part 1

Tagliapietra,

Giacomozzi,

Michelini

et al. 2024

Preprint

View full text Add to dashboard Cite

This paper describes different variants of broadband and simple attenuator modules for beamforming applications, based on Radio Frequency Micro Electro-Mechanical Systems (RF-MEMS), framed within Coplanar Waveguide (CPW) structures. The modules proposed in the first part of this work differ in their actuation voltage, topology, and desired attenuation level. Fabricated samples of basic 1-bit attenuation modules, characterized by a moderate footprint of 690 x 1960 µm2 and aiming at attenuation levels of -2, -3 and -5 dB in the 24.25-27.5 GHz range, are presented in their variants featuring both low actuation voltages (5-7 V) as well as higher values (~ 45V), the latter ones ensuring larger mechanical restoring force (and robustness against stiction). Beyond the fabrication non-idealities that affected the described samples, the substantial agreement between simulations and measurement outcomes proved that the proposed designs could provide precise attenuation levels up to 40 GHz, ranging up to nearly -3 dB and -5 dB for the series and shunt variants, respectively. Moreover, they could be effective building blocks for future wideband and reconfigurable RF-MEMS attenuators. In fact, in the second part of this work, combinations of the discussed cells and other configurations meant for larger attenuation levels will be investigated.

show abstract

RF MEMS variable attenuators with improved dB-linearity

Cited by 4 publications

References 31 publications

Discussion and Demonstration of RF-MEMS Attenuators Design Concepts and Modules for Advanced Beamforming in the Beyond-5G and 6G Scenario—Part 1

Discussion and Demonstration of RF-MEMS Attenuators Design Concepts and Modules for Advanced Beamforming in the Beyond-5G and 6G Scenario—Part 1

Discussion and Demonstration of RF-MEMS Attenuators Design Concepts and Modules for Advanced Beamforming in the Beyond-5G and 6G Scenario—Part 2

Discussion and Demonstration of RF-MEMS Attenuators Design Concepts and Modules for Advanced Beamforming in the Beyond-5G and 6G scenario – Part 1

Contact Info

Product

Resources

About