Tunable RF MEMS Inductors for Two-Frequency Bands

Abstract

This paper presents the design and simulation of two-variable MEMS inductors for high-frequency applications. In two cases, the inductors' cores are enclosed between two tunable metal plates. The medium permeability changes in response to iron plate movement, ensuring a high-tuning range above 250%. The first inductor is designed for the 10 GHz range, and the inductance value is comprised of Lmin = 3.37 nH and increases to Lmax = 11.8 nH. Similar inductance values are obtained for the second inductor, but it is designed to work at 20 GHz. Furthermore, the maximum value of the quality factor of the second inductor is slightly higher than the first one and reaches Qmax = 17.5.