Resonant Varifocal Mems Mirror

Kocer, Samed; Mukhangaliyeva, Lyazzat; Saritas, Resul; Gulsaran, Ahmet; Elhady, Alaa; Bell, Kevan; Kamel, Amr; Basha, Mohammad Abd Alkhalik; Das, Taylan; Kayaharman, Muhammed; Reza, Parsin Haji; Yavuz, Mustafa; Abdel‐Rahman, Eihab

doi:10.1109/mems51670.2022.9699771

Cited by 3 publications

(2 citation statements)

References 12 publications

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“…To illustrate the proposed packaging method for an actuator application, a m onator needed to be designed, and this design should be compatible with the a and characterization setups, and easy to fabricate and package. First, the importa ria were specified and then associated with geometrical and material properties Though only a single-terminal actuator application is illustrated in this work, the proposed concept is valid for sensor applications (accelerometer [14], gyroscope [15], mass sensor [16], humidity sensor [17], temperature sensor [18], pressure sensor [19], gas sensor [20], water sensor [21], magnetometers [22], photoacoustic sensors [23], FET-biosensor [24], and permittivity sensor [25]), optical and photonic applications (micromirror [26], microswitch [27], LiDAR [28], beam steering [29], bolometer [30], photon detector [31], and PeCOD [32]), RF applications (diode [33], transistor [34], antennas [35], switch [36], phase shifter [37], filter [38], and tunable capacitor [39]), microfluidics (micropump [40], microdroplet generator [41], and microvalve [42]), and other applications (energy harvester [43], rectenna [44], gripper [45], etc. ).…”

Section: Actuator Designmentioning

confidence: 99%

Built-In Packaging for Single Terminal Devices

Gulsaran

Azer

Kocer

et al. 2022

Sensors

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An alternative packaging method, termed built-in packaging, is proposed for single terminal devices, and demonstrated with an actuator application. Built-in packaging removes the requirements of wire bonding, chip carrier, PCB, probe station, interconnection elements, and even wires to drive single terminal devices. Reducing these needs simplifies operation and eliminates possible noise sources. A micro resonator device is fabricated and built-in packaged for demonstration with electrostatic actuation and optical measurement. Identical actuation performances are achieved with the most conventional packaging method, wire bonding. The proposed method offers a compact and cheap packaging for industrial and academic applications.

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Section: Actuator Designmentioning

confidence: 99%

Built-In Packaging for Single Terminal Devices

Gulsaran

Azer

Kocer

et al. 2022

Sensors

Self Cite

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“…Deformable focus control components are an acceptable alternative for the traditional lens–motor techniques [ 1 , 2 , 3 ]. Examples include liquid-filled lenses [ 4 ], electro-wetting lenses [ 5 , 6 ], and deformable mirrors [ 6 , 7 , 8 , 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 ]. MEMS-based variable-focal-length lenses use electrostatic forces or pressures to change the focal length of membranes or polymers.…”

Section: Introductionmentioning

confidence: 99%

Miniature Deformable MEMS Mirrors for Ultrafast Optical Focusing

2022

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Here, we introduce ultrafast tunable MEMS mirrors consisting of a miniature circular mirrored membrane, which can be electrostatically actuated to change the mirror curvature at unprecedented speeds. The central deflection zone is a close approximation to a parabolic mirror. The device is fabricated with a minimal membrane diameter, but at least double the size of a focused optical spot. The theory and simulations are used to predict maximum relative focal shifts as a function of membrane size and deflection, beam waist, and incident focal position. These devices are demonstrated to enable fast tuning of the focal wavefront of laser beams at ≈MHz tuning rates, two to three orders of magnitude faster than current optical focusing technologies. The fabricated devices have a silicon membrane with a 30–100 μm radius and a 350 nm gap spacing between the top and bottom electrodes. These devices can change the focal position of a tightly focused beam by ≈1 mm at rates up to 4.9 MHz and with response times smaller than 5 μs.

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Experimental investigation of rotating nodal line of MEMS-based nonlinear multi-mode resonators

Liu

2022

Sci Rep

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Nonlinear phenomenon is presently attracting considerable attention in the field of microelectromechanical systems (MEMS). By adjusting a controllable tuning voltage, the nonlinearity of microdevices, especially on microactuators, can be precisely manipulated. To trap and separate small particles, generating a large and stable rotation force is critical in micromanipulations. Here, we report a simple and potential angular momentum cell comprising a piezoelectric MEMS-based nonlinear multi-mode resonator with integrated electrodes. A nonlinear rotating nodal line has been observed in specific frequency bands by applying a controllable low voltage of sub 5 V on a 4-port resonator made of lead zirconate titanate (PZT) thin films. The magnitude of the actuated voltage is Complementary-Metal-Oxide-Semiconductor (CMOS)-compatible and easy to integrate with the circuit. Furthermore, the real-time rotation motion of the MEMS-based nonlinear multi-mode resonator is also verified by a laser doppler vibrometer (LDV) at both chirp and single input frequencies, respectively. Therefore, this angular momentum cell shows great potential in the application of micromanipulation.

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Resonant Varifocal Mems Mirror

Cited by 3 publications

References 12 publications

Built-In Packaging for Single Terminal Devices

Built-In Packaging for Single Terminal Devices

Miniature Deformable MEMS Mirrors for Ultrafast Optical Focusing

Experimental investigation of rotating nodal line of MEMS-based nonlinear multi-mode resonators

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