“…And, it was believed that the saturation current of MIS TD increases with the peripheral lateral flux of minority carriers if the majority carriers would encounter the effective Schottky barrier as tunneling through the oxide to the semiconductor (2). The mechanism is that the saturation current of MIS TD, I sat , exponentially increases with the decrease of effective Schottky barrier height, h * , and the effective Schottky barrier height decreases with the increase of lateral flux of minority carriers, F e , due to the increase of oxide voltage, V ox , i.e., (3) the lateral flux of electrons and the oxide thickness, d ox . Note that V ox increases with F e since the oxide voltage increases with larger electron concentration at the substrate surface.…”