Reduced TCF, High Frequency, Piezoelectric Contour-Mode Resonators with Silicon-on-Nothing

Ghosh, Sagnik; Sharma, Jaibir; Ng, Eldwin J.; Goh, Duan Jian; Merugu, Srinivas; Koh, Youngil; Lal, Amit

doi:10.1109/ius52206.2021.9593752

Cited by 6 publications

(1 citation statement)

References 9 publications

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“…This method avoids the lattice mismatch [110] and strain problems. An n-type degenerate doped resonator aligned with the <100> crystal orientation of the Si substrate was also proposed and achieved a TCF of −7.4 ppm/ • C [111]. A piezoelectric AlN resonator combining a composite structure of heavily doped and oxide layers has been reported in recent years [112].…”

Section: Passive Compensationmentioning

confidence: 99%

Concepts and Key Technologies of Microelectromechanical Systems Resonators

Feng

Yuan

et al. 2022

Micromachines

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In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stability of MEMS resonators, are summarized. Finally, the development status, existing challenges and future trend of MEMS resonators are summarized. As a typical research field of vibration engineering, MEMS resonators have shown great potential to replace quartz resonators in timing, frequency, and resonant sensor applications. However, because of the limitations of practical applications, there are still many aspects of the MEMS resonators that could be improved. This paper aims to provide scientific and technical support for the improvement of MEMS resonators in timing, frequency, and resonant sensor applications.

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Section: Passive Compensationmentioning

confidence: 99%