Concepts and Key Technologies of Microelectromechanical Systems Resonators

Abstract

In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stability of MEMS resonators, are summarized. Finally, the development status, existing challenges and future trend of MEMS resonators are summarized. As a typical research field of vibration engineering, MEMS resonators have shown great potential to replace quartz resonators in timing, frequency, and resonant sensor applications. However, because of the limitations of practical applications, there are still many aspects of the MEMS resonators that could be improved. This paper aims to provide scientific and technical support for the improvement of MEMS resonators in timing, frequency, and resonant sensor applications.

A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10,000

“…High resonant frequencies can be achieved with bulk modes of Si-based MEMS resonators, including Lamé mode, whispering gallery mode (WGM), width extensional mode (WEM), and so on [7,8]. The Lamé mode has a high Q value but transmits shear waves, and the stiffness is small; thus, is difficult to achieve ultra-high frequency.…”