Extraction of Material Properties of A Thin Silicon Membrane Embedded in A Piezoelectric Stack

Ghosh, Sagnik; Ramegowda, Prakasha Chigahalli; Jian Goh, Duan; Sharma, Jaibir; Koh, Yul; Lee, Joshua E.-Y.

doi:10.1109/ius51837.2023.10306882

2023 IEEE International Ultrasonics Symposium (IUS) 2023

DOI: 10.1109/ius51837.2023.10306882

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Extraction of Material Properties of A Thin Silicon Membrane Embedded in A Piezoelectric Stack

Sagnik Ghosh,

Prakasha Chigahalli Ramegowda,

Duan Jian Goh

et al.

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Extraction of Material Properties of A Thin Silicon Membrane Embedded in A Piezoelectric Stack

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References 13 publications

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