Piezoelectric MEMS for Frequency Control and Sensing

Zhu, Yao; Shashwat, Bhattacharya; Yang, Wenjia; Chen, Li; Zhang, Ying; Liu, Chen

doi:10.1109/eftf/ifcs57587.2023.10272160

2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) 2023

DOI: 10.1109/eftf/ifcs57587.2023.10272160

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Piezoelectric MEMS for Frequency Control and Sensing

Yao Zhu,

Bhattacharya Shashwat,

Wenjia Yang

et al.

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Piezoelectric MEMS for Frequency Control and Sensing

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