Recording oscillations of sub-micron size cantilevers by extreme ultraviolet Fourier transform holography

Abstract

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Extreme ultraviolet and soft X-ray imaging with compact, table top laser plasma EUV and SXR sources

“…Using a capillary discharge laser EUV microscopy in transmission mode was demonstrated recently with a single EUV laser pulse, leading to a 54 nm half-pitch spatial resolution and temporal resolution of $1 ns, as reported in [7] and was evaluated in more details using a correlation algorithm, reported in [8]. The same source was also used recently to perform diffraction microscopy of stationary and moving objects with nanometer spatial resolution and nanosecond temporal resolution [9,10]. Such source, although very bright and coherent, both spatially and temporarily, is very adequate for coherent imaging techniques, however, may not be the best choice for full field high resolution microscopy, due to coherence artifacts, presented in high resolution EUV micrographs, [7].…”

Extracting depth information of 3-dimensional structures from a single-view X-ray Fourier-transform hologram

“…Similarly, a thoroughly focused reconstruction of an extended 3D object can be obtained by numerically propagating the reconstructed wave fronts of individual object features outside the depth-of-field into focus. Additionally, the finite depth-of-field can be used to measure the position of a particular feature along the optical axis by examining the feature's reconstruction for different propagation lengths [22,23]. We thus consider the depth-of-field as the longitudinal resolution limit that allows a clear distinction between features that are closely displaced along the optical axis.…”

“…The holographic reconstruction of the wave field in the plane of the reference source allows to propagate the angular spectrum of the reconstructed object wave along the beam axis [18,20] and thereby refocus specimen features outside the depth-of-field. The finite depth-of-field resulting from the scattering geometry can be used to measure the distance between features along the beam axis as has been demonstrated for holography experiments using soft X-rays [21] and extreme ultra-violet (EUV) radiation [22,23]. In this work, the depth information is used to reconstruct a complete 3D model of a specimen.…”

Single-shot picosecond resolution Fourier transform holographic microscopy with large field of view using a compact soft x-ray laser

“…This is the approach of Fourier transform holography (FTH) 17 and coherent diffractive imaging (CDI) 18 . However, the absence of optics that gather the light into the image plane imposes for these approaches the challenge to obtain enough flux to be able to record single-shot images with high spatial and temporal resolution 12,16,[19][20][21][22][23][24] .…”