Qualitative and quantitative characterization of outgassing from SU-8

Melai, J.; Salm, Cora; Wolters, R.A.M.; Schmitz, Jurriaan

doi:10.1016/j.mee.2008.11.008

Cited by 12 publications

(12 citation statements)

References 7 publications

(9 reference statements)

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“…However, photoresist materials can generate gas upon 66 annealing for long time periods or during high-power sputter 67 deposition. For example, the epoxy-based photoresist SU-8 (Nip-68 pon Kayaku Co., Ltd.) generates gas containing 2-propenal, ben-69 zene, propylene carbonate, and diphenyl sulfide during the 70 annealing process [11]. TFMG crystallizes upon absorbing impuri-71 ties from the gas.…”

Section: Abstract 27mentioning

confidence: 99%

Fabrication of Cu–Zr–Ti thick film metallic glass structure by double metal mask lift-off process

Watanabe

Sakùrai

Hata

2015

Microelectronic Engineering

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Section: Abstract 27mentioning

confidence: 99%

Fabrication of Cu–Zr–Ti thick film metallic glass structure by double metal mask lift-off process

Watanabe

Sakùrai

Hata

2015

Microelectronic Engineering

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“…Spacecraft outgassing is minimized by careful selection of the materials and by hermetic sealing whenever possible. A bakeout, that is, to treat the material in vacuum or in a controlled atmosphere at temperatures as high as possible, is recommended to accelerate outgassing from materials, thus reducing the content of contaminants before use .…”

Section: Introductionmentioning

confidence: 99%

“…To evaluate outgassing from polymers, GC–MS is most usually preferred . In addition, when dealing with solid samples, all the GC injection requirements are superbly managed using a thermal desorption (TD)/sorption system.…”

Section: Introductionmentioning

confidence: 99%

“…In a TD‐GC–MS study of outgassing of polyimides, adhesives and other chemicals used in the manufacturing of radiation detectors, styrene and aromatic solvents were confirmed to cause gain losses . TD‐GC–MS has been used to study the outgassing characteristics of cross‐linked epoxy‐based SU‐8 resin; carbon dioxide and a series of VOCs were found . TD‐GC–MS was used to show that flame retardants (organophosphorus triesters) and plasticizers (phthalate esters) were the main contaminants of silicon wafer surfaces .…”

Section: Introductionmentioning

confidence: 99%

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Thermal desorption gas chromatography with mass spectrometry study of outgassing from polymethacrylimide foam (Rohacell®)

Carrasco-Correa

Herrero‐Martínez

Consuegra

et al. 2015

J of Separation Science

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Polymethacrylimide foams are used as light structural materials in outer-space devices; however, the foam closed cells contain volatile compounds that are outgassed even at low temperatures. These compounds ignite as plasmas under outer-space radiation and the intense radio-frequency fields used in communications. Since plasmas may cause spacecraft fatal events, the conditions in which they are ignited should be investigated. Therefore, qualitative and quantitative knowledge about polymethacrylimide foam outgassing should be established. Using thermogravimetric analysis, weight losses reached 3% at ca. 200°C. Thermal desorption gas chromatography with mass spectrometry detection was used to study the offgassed compounds. Using successive 4 min heating cycles at 125°C, each one corresponding to an injection, significant amounts of nitrogen (25.3%), water (2.6%), isobutylene (11.3%), tert-butanol (2.9%), 1-propanol (11.9%), hexane (25.3%), propyl methacrylate (1.4%), higher hydrocarbons (11.3%), fatty acids (2.2%) and their esters (1.3%), and other compounds were outgassed. Other compounds were observed during the main stage of thermal destruction (220-280°C). A similar study at 175°C revealed the extreme difficulty in fully outgassing polar compounds from polymethacrylimide foams by baking and showed the different compositions of the offgassed atmosphere that can be expected in the long term.

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“…It exhibits many properties that make it suitable for the microfabrication of particle detectors, such as the ability to be structured in a broad range of thicknesses and with high aspect ratios [2], excellent smoothness [3] and transparency [4] (desirable characteristics for the optical materials used in detectors such as scintillators), a relatively high dielectric strength [5] (desirable in devices making use of high electric fields, such as gaseous ionization detectors), and finally low outgassing [6] (necessary to avoid the pollution of the high vacuum environments in which many detectors work) and radiation tolerance [7]. Here we review several particle detector technologies making use of microstructures obtained by SU-8 processing.…”

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confidence: 99%

SU-8 as a Material for Microfabricated Particle Physics Detectors

Maoddi

Mapelli

Jiguet³

et al. 2014

Micromachines

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Several recent detector technologies developed for particle physics applications are based on microfabricated structures. Detectors built with this approach generally exhibit the overall best performance in terms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it suitable for the manufacturing of microstructured particle detectors. This article aims to review some emerging detector technologies making use of SU-8 microstructuring, namely micropattern gaseous detectors and microfluidic scintillation detectors. The general working principle and main process steps for the fabrication of each device are reported, with a focus on the advantages brought to the device functionality by the use of SU-8. A novel process based on multiple bonding steps for the fabrication of thin multilayer microfluidic scintillation detectors developed by the authors is presented. Finally, a brief overview of the applications for the discussed devices is given.

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Qualitative and quantitative characterization of outgassing from SU-8

Cited by 12 publications

References 7 publications

Fabrication of Cu–Zr–Ti thick film metallic glass structure by double metal mask lift-off process

Fabrication of Cu–Zr–Ti thick film metallic glass structure by double metal mask lift-off process

Thermal desorption gas chromatography with mass spectrometry study of outgassing from polymethacrylimide foam (Rohacell®)

SU-8 as a Material for Microfabricated Particle Physics Detectors

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