2009
DOI: 10.1364/oe.17.016322
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Quadrature phase-shift error analysis using a homodyne laser interferometer

Abstract: The influence of quadrature phase shift on the measured displacement error was experimentally investigated using a two-detector polarizing homodyne laser interferometer with a quadrature detection system. Common nonlinearities, including the phase-shift error, were determined and effectively corrected by a robust data-processing algorithm. The measured phase-shift error perfectly agrees with the theoretically determined phase-shift error region. This error is systematic, periodic and severely asymmetrical arou… Show more

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Cited by 68 publications
(44 citation statements)
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“…The resulting phase shift observed by the interferometer was calculated from the raw fringe data using a well-established data processing procedure for the traditional CW laser interferometer with two-quadrature detection [13]. In short, the voltage outputs from the two photodetectors were normalized to the same peak amplitude and the DC offset was removed.…”
Section: Quasi-static Displacement Measurementsmentioning
confidence: 99%
“…The resulting phase shift observed by the interferometer was calculated from the raw fringe data using a well-established data processing procedure for the traditional CW laser interferometer with two-quadrature detection [13]. In short, the voltage outputs from the two photodetectors were normalized to the same peak amplitude and the DC offset was removed.…”
Section: Quasi-static Displacement Measurementsmentioning
confidence: 99%
“…Its quadrature scheme is explained in Table 1, which describes the function of each constituent used. readers who are interested in the details should peruse the principle of operation and the corresponding theoretical analysis of the single-probe homodyne quadrature laser interferometer (HQLI), which is extensively described in [16]. The main modification in the optical setup of the single-probe HQLI, to obtain the dual-probe HQLI, is the employment of the reference arm as the second probe.…”
Section: Principle Of Operationmentioning
confidence: 99%
“…This is done rather than directly returning the beam toward the nonpolarizing beam splitter (NBS). The DPQHLI can be theoretically treated by modeling the propagation of coherent, collimated, and polarized light through various optical components using Jones matrix formalism as was done for the single-probe HQLI in [16]. The resulting optical powers of the beams illuminating the photodiodes are proportional to the signals x and y at the two respective outputs of the photodiodes PDx and PDy, each of which monitors mutually orthogonal polarizations.…”
Section: Principle Of Operationmentioning
confidence: 99%
“…The underlying principle is to measure the phase variation of a single light wavelength with distance by employing homodyne [9][10][11][12] or heterodyne phase-measuring electronics [13][14][15][16]. This single wavelength method leads to incremental displacement measurement with nanometer-region sub-wavelength resolutions over extensive ranges up to several meters.…”
Section: Introductionmentioning
confidence: 99%