Properties of dc magnetron sputtered indium tin oxide films on polymeric substrates at room temperature

Abstract

Indium tin oxide (ITO) thin films were deposited on polymeric substrates at room temperature by dc reactive magnetron sputtering from an In–Sn (90–10 wt%) alloy target. The electrical, optical, and mechanical properties of ITO films on various substrates such as polycarbonate, acrylic, polyethylene terephthalate, and glass are influenced sensitively by sputtering parameters. Therefore, the dependence of these properties on dc power, working pressure, and partial oxygen content has been systematically investigated. Low dc power was applied to avoid the deformation of polymeric substrates. The electrical resistivity of as-deposited ITO films decreases initially and then increases as oxygen partial pressure (PO2) increases. The optical transmittance at visible wavelength of 550 nm was as much as 85%. The friction force of as-deposited ITO films on various substrates is increased with an increase of dc power, and behaves similarly to the optimum curve of resistivity with increasing PO2.

Transparent conductive In2O3:Mo thin films prepared by reactive direct current magnetron sputtering at room temperature

“…It is reported that the dominant scattering mechanism in ITO films deposited at room temperature by DCMS is ascribed to the ionized impurity scattering centers both of oxygen vacancies and the Sn dopant [4]. For IMO films the similar scattering mechanism may be explained.…”

“…There are various deposition techniques used to grow TCO films at room temperature, including direct current [4][5][6][7][8] or radio frequency [9][10][11][12] reactive magnetron sputtering (DCMS/RFMS), high density plasma evaporation (HDPE) [13], and reactive thermal evaporation (RTE) [14]. The lowest resistivity of the films deposited by these techniques is about 2 Â 10 À 4 V cm from a ceramic target, while not less than 9.0 Â 10 À 4 V cm from a metal target on glass and plastic substrates.…”

Low temperature remote plasma sputtering of indium tin oxide for flexible display applications

“…For growth onto flexible substrates however, this is not feasible due to the temperature sensitive nature of the organic material. Hence the deposition of good quality ITO onto polymeric materials without heating the substrates either during or post deposition still represents a significant challenge [10,[12][13][14].…”

Отделение Тонких Пленок ITO От Кремниевой Подложки С Помощью Микросекундного Лазерного Облучения

“…Та-ким образом, сужается область применения пленок ITO в устройствах гибкой оптоэлектроники, солнечных элементах, органической фотоэлектронике и др. [6,7]. В связи с этим в последнее время стало актуальным получение прозрачных проводящих покрытий при пони-женных температурах синтеза на термочувствительных подложках.…”