“…We use a simplified logic gate stage ( Figure 9) as in [22], [23], which contains a driving gate (e.g., inverter), a wire load (resistance and capacitance), and a gate load (e.g., inverter), to simulate the propagation delay change of standard cells after using the buried layer. The accuracy of the simplified gate model for chip-level speed estimation has been verified in [22], [23] against synthesis, placement, and routing. In our library, when a cell is redesigned with the additional buried layer, total copper wire length (M 1 and M 2 ) is reduced and the use of Tungsten (M -1 and CA) increases due to the routes that get relocated to M -1 from M and M .…”