Pressure transducer with Au-Ni thin-film strain gauges

Rajanna, K.; Mohan, S.; Nayak, M.M.; Gunasekaran, Nallappan; Muthunayagam, A.E.

doi:10.1109/16.199357

Cited by 36 publications

(7 citation statements)

References 23 publications

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“…The maximum GF of the V-doped MoS 2 strain sensor (140) is dozens of times larger than that of the conventional metal-based strain sensors (GF = 1-5) and several times higher than polysilicon-based strain sensors (GF = 40). 35,36) However, it is still lower than that of the state-of-the-art single-crystal Si strain sensors (GF = 200). 3) To further improve the GF, the optimization should be focused on controlling the doping concentration and improving the grain size and crystallinity.…”

mentioning

confidence: 94%

Vanadium-doped molybdenum disulfide film-based strain sensors with high gauge factor

Zhu

Inomata

et al. 2019

Appl. Phys. Express

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This paper reports the piezoresistive performance of the two-dimensional (2D) material of vanadium (V)-doped molybdenum disulfide (MoS2) films based on sulfurization of sputtered Mo thin films. I–V characteristics indicate that V atom doping indeed decreases the resistivity of MoS2. Strain sensors based on V-doped MoS2 resistive elements were fabricated. By using a four-point bending method, a gauge factor (GF) of 140 under compressive and tensile strain conditions was obtained. The piezoresistive effect of V-doped MoS2 with different V sputtering conditions was also investigated. The doping method introducing V atoms as dopants is found to play an important role in enhancing piezoresistive performance.

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mentioning

confidence: 94%

Vanadium-doped molybdenum disulfide film-based strain sensors with high gauge factor

Zhu

Inomata

et al. 2019

Appl. Phys. Express

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“…The results indicate that the TFTC has a nearly linear relationship between temperature and thermoelectric output voltage at the experimented temperature range, and its thermoelectric sensitivity is estimated as 41. 6 C. There was no visible physical damage on the TFTC fabricated on the stainless steel substrate up to approximately 600 C.…”

Section: Sensor Characterizationmentioning

confidence: 97%

“…Thin-film thermocouples (TFTCs) are used in a broad range of applications for measuring surface temperatures [3]- [5]. Thin-film strain gauges (TFSGs) offer several advantages [6]- [11], including the absence of adhesive material, flexibility to tailor the properties of the sensor material in thin-film form, good linearity, improved strain sensitivity, and fast response.…”

mentioning

confidence: 99%

Microfabrication and Characterization of Metal-Embedded Thin-Film Thermomechanical Microsensors for Applications in Hostile Manufacturing Environments

Choi

Datta

Cheng

et al. 2006

J. Microelectromech. Syst.

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Effective monitoring and diagnosis of manufacturing processes is of critical importance. If critical manufacturing process conditions are continuously monitored, problems can be detected and solved during the processing cycle. However, current technology still evidently lags behind practical needs. Microfabricated thin-film thermocouples and strain gauges are attractive for their small size and fast response. It is challenging to fabricate and embed these sensors into metallic components that are widely used in manufacturing. This paper investigates the fabrication, embedding, and characterization of metal embedded thin-film thermocouples and strain gauges. The materials (dielectric and metallic) constituting a complete microsensor were characterized and optimized. The results obtained from characterization and optimization of materials are presented and discussed. Thin-film thermocouples on stainless steel substrates (before and after embedding) were calibrated to elevated temperatures. The behavior of thin-film strain gauges was also studied. The metal embedded sensors demonstrated good accuracy, sensitivity, and linearity that matched the performance of commercial thermocouples and strain gauges well. The metal embedded microsensors are promising for in situ monitoring in hostile manufacturing environments. [1571]Index Terms-Characterization, hostile environment, metal-embedding, microfabrication, thin film microsensor.

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“…Several studies have strived to develop large-scale integrated networks of sensors by exploiting metal foil strain gauges as well as amorphous and polycrystalline silicon [ 101 , 102 , 103 , 104 , 105 ]. However, such materials face considerable issues due to low sensitivity and limited scalability.…”

Section: Novel Materialsmentioning

confidence: 99%

Recent Advances in Tactile Sensing Technology

et al. 2018

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Research on tactile sensing technology has been actively conducted in recent years to pave the way for the next generation of highly intelligent devices. Sophisticated tactile sensing technology has a broad range of potential applications in various fields including: (1) robotic systems with tactile sensors that are capable of situation recognition for high-risk tasks in hazardous environments; (2) tactile quality evaluation of consumer products in the cosmetic, automobile, and fabric industries that are used in everyday life; (3) robot-assisted surgery (RAS) to facilitate tactile interaction with the surgeon; and (4) artificial skin that features a sense of touch to help people with disabilities who suffer from loss of tactile sense. This review provides an overview of recent advances in tactile sensing technology, which is divided into three aspects: basic physiology associated with human tactile sensing, the requirements for the realization of viable tactile sensors, and new materials for tactile devices. In addition, the potential, hurdles, and major challenges of tactile sensing technology applications including artificial skin, medical devices, and analysis tools for human tactile perception are presented in detail. Finally, the review highlights possible routes, rapid trends, and new opportunities related to tactile devices in the foreseeable future.

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Pressure transducer with Au-Ni thin-film strain gauges

Cited by 36 publications

References 23 publications

Vanadium-doped molybdenum disulfide film-based strain sensors with high gauge factor

Vanadium-doped molybdenum disulfide film-based strain sensors with high gauge factor

Microfabrication and Characterization of Metal-Embedded Thin-Film Thermomechanical Microsensors for Applications in Hostile Manufacturing Environments

Recent Advances in Tactile Sensing Technology

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