Preparation of highly conducting Al-doped ZnO target by vacuum heat-treatment for thin film solar cell applications

Asemi, Morteza; Ahmadi, Morteza; Ghanaatshoar, Majid

doi:10.1016/j.ceramint.2018.04.096

Cited by 57 publications

(20 citation statements)

References 52 publications

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“…We assumed that not only the increase of carrier concentration (see Fig. 3f), but also internal stress and phase purity [16,37], can affect the optical bandgap of AZO thin lms.…”

Section: Optical Properties Of Azo Thin Lmsmentioning

confidence: 99%

“…And high quality AZO thin lms can be obtained by annealing under nitrogen atmosphere [12,13]. However, the higher deposition and annealing temperature may result in the distortion of the underneath layers and facilitate the interlayer diffusion [14][15][16]. In order to fabricate solar cells, AZO thin lms should be deposited at suitable temperature.…”

Section: Introductionmentioning

confidence: 99%

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RF magnetron sputtering processed transparent conductive aluminum doped ZnO thin films with excellent optical and electrical properties

Zhao

Liu²,

Guo

et al. 2021

J Mater Sci: Mater Electron

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Aluminum doped ZnO thin lms (AZO), which simultaneously transmit light and conduct electrical current, are widely applied in photovoltaic devices. To achieve high performance AZO thin lms, the effects of RF magnetron sputtering conditions on the optical and electrical properties of the lms has been explored. The optimized AZO thin lms exhibit strong (002) orientated growth with hexagonal wurtzite structure. The minimum resistivity of 0.9Í10 -3 Ω•cm, the highest carrier concentration of 2.8Í10 20 cm -3 , the best Hall mobility of 22.8 cm 2 •(V•s) -1 and average transmittance above 85% can be achieved at the optimum deposition condition of 0.2 Pa, 120 W and 200 °C. Considering the single parabolic band model, the bandgap shift by carrier concentration of the lms can be attributed to the Burstein-Moss effect. The results indicate that RF magnetron sputtered AZO thin lms are promising for solar cell applications relying on front contact layers.

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“…We assumed that not only the increase of carrier concentration (see Fig. 3f), but also internal stress and phase purity [16,37], can affect the optical bandgap of AZO thin lms.…”

Section: Optical Properties Of Azo Thin Lmsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

RF magnetron sputtering processed transparent conductive aluminum doped ZnO thin films with excellent optical and electrical properties

Zhao

Liu²,

Guo

et al. 2021

J Mater Sci: Mater Electron

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show abstract

“…In our previous studies, we have prepared both high-quality ZnO and CuCrO 2 thin films 46 , 47 . Regarding ZnO thin film, we could enhance its electrical conductivity through the addition of Al dopant and the creation of oxygen vacancies in its lattice through the vacuum heat-treatment of the target prior to deposition 47 .…”

Section: Introductionmentioning

confidence: 99%

An all-sputtered photovoltaic ultraviolet photodetector based on co-doped CuCrO2 and Al-doped ZnO heterojunction

Ahmadi

Abrari

Ghanaatshoar

2021

Sci Rep

Self Cite

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We propose and fabricate a heterojunction between Al-doped ZnO and (Mg, N)-doped CuCrO2 thin films using the sputtering deposition method. These materials possess wide bandgap that makes them transparent in the visible light but excellent UV-absorbers. On the other hand, the high conductivity of these materials, respectively as n-type and p-type transparent conducting oxides, facilitates the charge transport. We show that the p–n junction fabricated from these materials has the potential to act as a high-performance UV photovoltaic photodetector. The proposed structure, demonstrates fast responses in order of sub seconds, photosensitivity of ~ 41,000, responsivity of 1.645 mA/W, and a detectivity of 3.52 × 1012 Jones that are significantly improved in comparison with the Al-doped ZnO photoconductor. This excellent improvement is attributed to the capability of the photovoltaic configuration that creates a built-in voltage and facilitates the charge separation and collection rather than recombination in the photoconductor configuration.

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“…Transparent conducting oxides (TCOs) have numerous applications in optoelectronics and electronic devices like light emitting diodes (LEDs), flexible electronic devices, flat panel displays, solar cells, [1][2][3] sensors, [4][5][6] etc. Indium tin oxide (ITO) is one of the most commonly used TCOs, however, the toxicity, limited availability and high cost of the indium are major issues.…”

Section: Introductionmentioning

confidence: 99%

Temperature dependent studies on radio frequency sputtered Al doped ZnO thin film

Bhujbal¹,

Pathan²,

Chaure³

2020

Eng. Sci.

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In this work, highly conductive and transparent Al: ZnO (Al doped ZnO, i. e., AZO) thin films were grown by radio frequency (RF) magnetron sputtering technique at a typical deposition temperature. The effect of deposition temperature on the structural, morphological, optical and electrical properties was studied. The x-ray diffraction (XRD) studies revealed a hexagonal wurtzite crystal structure for all AZO layers with a (002) preferred orientation along the c-axis. Columnar, compact, uniform grain growth of the layer was observed from atomic force microscopy (AFM) images. The deposition temperature had an influence on the surface roughness and average grain size of deposited films, which could be confirmed by means of AFM images. Optical studies confirmed that both optical band gap energy and urbach energy were influenced by the substrate temperature. Highly transparent films with an energy band gap ranging from 3.48 to 3.65 eV were obtained upon changing the deposition temperature from 22 to 400. The presence of defects was confirmed by ℃ photoluminescence (PL) spectra. A systematic measurement of the electrical parameters like barrier height, and ideality factor of the devices (Ag/Al:ZnO) was carried out with the help of I-V characteristic. This study may be useful for the design and fabrication of AZO based electrodes for solar cell applications.

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Preparation of highly conducting Al-doped ZnO target by vacuum heat-treatment for thin film solar cell applications

Cited by 57 publications

References 52 publications

RF magnetron sputtering processed transparent conductive aluminum doped ZnO thin films with excellent optical and electrical properties

RF magnetron sputtering processed transparent conductive aluminum doped ZnO thin films with excellent optical and electrical properties

An all-sputtered photovoltaic ultraviolet photodetector based on co-doped CuCrO2 and Al-doped ZnO heterojunction

Temperature dependent studies on radio frequency sputtered Al doped ZnO thin film

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