2020
DOI: 10.30919/es8d1003
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Temperature dependent studies on radio frequency sputtered Al doped ZnO thin film

Abstract: In this work, highly conductive and transparent Al: ZnO (Al doped ZnO, i. e., AZO) thin films were grown by radio frequency (RF) magnetron sputtering technique at a typical deposition temperature. The effect of deposition temperature on the structural, morphological, optical and electrical properties was studied. The x-ray diffraction (XRD) studies revealed a hexagonal wurtzite crystal structure for all AZO layers with a (002) preferred orientation along the c-axis. Columnar, compact, uniform grain growth of t… Show more

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Cited by 15 publications
(13 citation statements)
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References 53 publications
(72 reference statements)
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“…The melting point depression was also observed in other metal nanomaterials, such as zirconium and aluminum . Semiconductor nanostructures are key functional and structural components for devices such as nanoelectronics, , solar cells, nanocircuits, laser diodes, sensors, , energy conversion and storage systems, , and water treatment systems because of their unique physical and chemical properties. Unlike metal nanostructures, the thermal stability of semiconductor nanostructures has been rarely investigated.…”
Section: Introductionmentioning
confidence: 99%
“…The melting point depression was also observed in other metal nanomaterials, such as zirconium and aluminum . Semiconductor nanostructures are key functional and structural components for devices such as nanoelectronics, , solar cells, nanocircuits, laser diodes, sensors, , energy conversion and storage systems, , and water treatment systems because of their unique physical and chemical properties. Unlike metal nanostructures, the thermal stability of semiconductor nanostructures has been rarely investigated.…”
Section: Introductionmentioning
confidence: 99%
“…The results of a number of experimental studies are of great importance for understanding the mechanisms of occurrence of temperature stresses in the process of curing of the repair patch and possible ways to reduce them [37,38]. Study of the temperature deformations occurring in the structure under various temperature and time conditions of polymerization are dealt with in [39,40].…”
Section: Introductionmentioning
confidence: 99%
“…Different doped (Al, Ga, In) zinc oxide (ZnO) films exhibit good electrical conduction and optical transmission in the visible region. [20][21] In different experiment many groups have shown the promising results of electrical resistivity (10 -4 • cm) and high optical transmission (more than 90%) in case of doped Zinc oxide (ZnO) [22,23] thin films. The results such as, conductivity, optical transmission and sheet resistance of doped ZnO thin film, makes itself an alternative TCO material.…”
Section: Introductionmentioning
confidence: 99%