“…Several methods have been used to prepare In 2 O 3 thin films, such as dc and rf sputtering [21][22][23], reactive evaporation [24,25], evaporation of metallic indium and subsequent oxidation [26,27], chemical vapor deposition [28], spray pyrolysis [29,30], sol-gel [16,31] and laser ablation [32]. Metal organic chemical vapor deposition (MOCVD) technique is a new and low cost approach for thin film deposition of indium oxide films, which offers the opportunity to control the stoichiometry and morphology by varying the process parameters.…”