NOx sensing properties of In2O3 thin films grown by MOCVD

Ali, Muhammad Asım; Wang, Ch. Y.; Röhlig, C.-C.; Cimalla, V.; Stauden, Thomas; Ambacher, O.

doi:10.1016/j.snb.2007.08.011

Cited by 57 publications

(23 citation statements)

References 35 publications

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“…Semiconductor thin films such as SnO 2 , TiO 2 , WO 3 , MoO 3 and In 2 O 3 have been widely investigated for sensing different toxic gases [1][2][3][4][5]. For that purpose a large number of techniques and devices have been developed.…”

Section: Introductionmentioning

confidence: 99%

Preparation and characterization of ALD deposited ZnO thin films studied for gas sensors

Boyadjiev

Георгиева

Yordanov

et al. 2016

Applied Surface Science

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Abstract. Applying atomic layer deposition (ALD) very thin zinc oxide (ZnO) films were deposited on quartz resonators, and their gas sensing properties were studied using the quartz crystal microbalance (QCM) method. The gas sensing of the ZnO films to NO 2 was tested in the concentration interval between 10 and 5000 ppm. On the basis of registered frequency change of the QCM, for each concentration the sorbed mass was calculated. Further characterization of the films was carried out by various techniques, i.e. by SEM-EDS, XRD, ellipsometry, and FTIR spectroscopy. Although being very thin, the films were gas sensitive to NO2 already at room temperature and could register very well as low concentrations as 100 ppm, while the sorption was fully reversible. Our results for very thin ALD ZnO films show that the described fast, simple 3 and cost-effective technology could be implemented for producing gas sensors working at room temperature and being capable to register in real time low concentrations of NO 2 .

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Section: Introductionmentioning

confidence: 99%

Preparation and characterization of ALD deposited ZnO thin films studied for gas sensors

Boyadjiev

Георгиева

Yordanov

et al. 2016

Applied Surface Science

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“…Since the hard template is usually synthesized in a preceding (soft or hard) templating procedure, the entire process can be envisaged as ''repeated templating''. [1] Indium oxide is a promising material for application as a sensor for various oxidizing gases, such as O 3 , [23][24][25][26] O 2 , [27] or nitric oxides, [24,25,28] as well as for reducing gases like CO or H 2 . [29,30] The principle of semiconducting metal oxide gas sensors is based on surface-chemical interaction between gas molecules and the crystalline sensor material.…”

Section: Introductionmentioning

confidence: 99%

Ordered Mesoporous In₂O₃: Synthesis by Structure Replication and Application as a Methane Gas Sensor

Waitz

Wagner

Sauerwald

et al. 2009

Adv Funct Materials

307

184

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The synthesis and characterization of ordered mesoporous In2O3 materials by structure replication from hexagonal mesoporous SBA‐15 silica and cubic KIT‐6 silica is presented. Variation of the synthesis parameters allows for different pore sizes and pore wall thicknesses in the products. The In2O3 samples turn out to be stable up to temperatures between 450 °C and 650 °C; such high thermal stability is necessary for their application as gas sensors. Test measurements show a high sensitivity to methane gas in concentrations relevant for explosion prevention. The sensitivity is shown to be correlated not only with the surface‐to‐volume ratio, but also with the nanoscopic structural properties of the materials.

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“…Chemical gas sensors have found wide applications in industrial production, environmental monitoring and protection [1][2][3]. Many of these sensors are fabricated by loading metal-oxide semiconductor (MOS) materials as the sensing materials, such as SnO 2 [2], ZnO [4], WO 3 [3], In 2 O 3 [5], and NiO [6]. The sensor performances are strongly dependent on the morphology and structure of MOS, namely, grain size, surface area and dimension, as well as the type of grain network or porosity [7].…”

mentioning

confidence: 99%

Comparative investigation of three types of ethanol sensor based on NiO-SnO2 composite nanofibers

Shen

Xia

et al. 2012

Chin. Sci. Bull.

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NiO-SnO 2 composite nanofibers were synthesized via electrospinning techniques and characterized by X-ray diffraction, scanning electron microscopy, transmission electron microscopy, and X-ray photoelectron spectroscopy. Three types of sensor were applied to investigate the sensing properties of these nanofibers. Sensors A were fabricated by mixing the nanofibers with deionized water, and then grinding and coating them on ceramic tubes to form indirect heated gas sensors. Microsensors B (with an area of 600 μm×200 μm) were formed by spinning nanofibers on Si substrates with Pt signal electrodes and Pt heaters. Sensors C were fabricated by spinning nanofibers on plane ceramic substrates (with a large area of 13.4 mm×7 mm) with Ag-Pd signal electrodes only. The operating temperatures of sensors A and B were controlled by adjusting heater currents, and the operating temperatures of sensors C were controlled by adjusting an external temperature control device. Experimental results show that sensors C possess the highest sensing properties, such as high response values (about 42 to 100 μL/L ethanol), quick response/recovery speeds (the response and recovery times were 4 and 7 s, respectively), and excellent consistencies. These phenomena were explained by the retained fiber morphology and suitable sensor area. The presented results can provide some useful information for the design and optimization of one-dimensional nanomaterial-based gas sensors.SnO 2 , semiconductors, electrospinning, nanofibers, gas sensors Citation:Shen R S, Li X P, Xia X C, et al. Comparative investigation of three types of ethanol sensor based on NiO-SnO 2 composite nanofibers.

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NOx sensing properties of In2O3 thin films grown by MOCVD

Cited by 57 publications

References 35 publications

Preparation and characterization of ALD deposited ZnO thin films studied for gas sensors

Preparation and characterization of ALD deposited ZnO thin films studied for gas sensors

Ordered Mesoporous In₂O₃: Synthesis by Structure Replication and Application as a Methane Gas Sensor

Comparative investigation of three types of ethanol sensor based on NiO-SnO2 composite nanofibers

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NOx sensing properties of In2O3 thin films grown by MOCVD

Cited by 57 publications

References 35 publications

Preparation and characterization of ALD deposited ZnO thin films studied for gas sensors

Preparation and characterization of ALD deposited ZnO thin films studied for gas sensors

Ordered Mesoporous In2O3: Synthesis by Structure Replication and Application as a Methane Gas Sensor

Comparative investigation of three types of ethanol sensor based on NiO-SnO2 composite nanofibers

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Product

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Ordered Mesoporous In₂O₃: Synthesis by Structure Replication and Application as a Methane Gas Sensor