Preparation and characterization of ALD deposited ZnO thin films studied for gas sensors

Boyadjiev, Stefan Ivanov; Георгиева, В.; Yordanov, Rumen; Raicheva, Z.; Szilágyi, Imre Miklós

doi:10.1016/j.apsusc.2016.06.007

Cited by 62 publications

(37 citation statements)

References 26 publications

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“…In our previous studies we already applied very thin ALD films for gas sensing [10][11], as well core/shell nanocomposite fibers produced by electrospinning and ALD to be successfully used as photocatalysts [12].…”

Section: Introductionmentioning

confidence: 99%

TiO2/ZnO and ZnO/TiO2 core/shell nanofibers prepared by electrospinning and atomic layer deposition for photocatalysis and gas sensing

Boyadjiev

Kéri

Bárdos

et al. 2017

Applied Surface Science

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Abstract:In the present work, core TiO 2 and ZnO oxide nanofibers were prepared by electrospinning, then shell oxide (ZnO, TiO 2 ) layers were deposited on them by atomic layer deposition (ALD). The aim of preparing ZnO and TiO 2 nanofibers, as well as ZnO/TiO 2 and 3 TiO 2 /ZnO nanocomposites is to study the interaction between the oxide materials when a pure oxide fiber is covered with thin film of the other oxide, and explore the influence of exchanging the core and shell materials on their photocatalytic and gas sensing properties.The composition, structure and morphology of the pure and composite nanofibers were studied by SEM-EDX, TEM, XRD, FTIR, UV-Vis and Raman. The photocatalytic activity of the as-prepared materials was analyzed by UV-Vis spectroscopy through decomposing aqueous methyl orange under UV irradiation. The gas sensing of the nanofibers was investigated by detecting 100 ppm NH 3 at 150 and 220 °C using interdigital electrode based sensors.

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Section: Introductionmentioning

confidence: 99%

TiO2/ZnO and ZnO/TiO2 core/shell nanofibers prepared by electrospinning and atomic layer deposition for photocatalysis and gas sensing

Boyadjiev

Kéri

Bárdos

et al. 2017

Applied Surface Science

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“…ZnO는 저렴한 원료, 안정된 화학특성, 간단한 증착방법 등의 장점을 기반으로 광학 및 센서재료로 널리 연구되어 왔다 [1,2]. 또한 ZnO의 넓은 에너지밴드갭(3.3 eV)과 큰 엑시톤 바인딩 에 너지(60 meV)를 이용하여 투명박막트랜지스터 및 단파장 소자로 개발하고자 하는 연구도 광전자 분야에서 진행되고 있다 [3,4].…”

Section: 서 론unclassified

Effects of Precursor Concentration on the Growth of ZnO Nanorods

Ma¹

2016

The Transactions of The Korean Institute of Electrical Engineer

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-In this study, ZnO nanorods were grown by a hydrothermal method. SiO 2 /Si wafers and glass were used as substrates. ~20 nm-thick ZnO thin films were rf magnetron sputtered for seed layers. The precursor was prepared by mixing zinc nitrate hexahydrate and hexamethylenetetramine (hexamine) in DI water. The concentration of zinc nitrate hexahydrate was fixed at 0.05 mol, and that of hexamine was varied between 0 mol to 0.1 mol. The reactor containing substrates and precursor was put in an oven maintained at 90 °C for 1 h. X-ray diffraction was carried out to analyze the crystallinity of ZnO nanorods, and a field emission scanning electron microscope was employed to observe the morphology of nanorods. Transmittance and absorbance were measured by a UV-Vis spectrophotometer. Photoluminescence measurements were conducted using 266 nm light.

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“…TiO 2 , MoO 3 , ZnO) were already fabricated by our team and tested for sensitivity to NO 2 in a specially designed experimental set-up [24]. These films were mostly prepared by reactive magnetron sputtering [25][26] and atomic layer deposition (ALD) [11][12]. In the present study, we focused on the sensing behavior of WO 3 thin films grown by PLD.…”

Section: Preparation Of the Gas Sensorsmentioning

confidence: 99%

“…In the present study, we focused on the sensing behavior of WO 3 thin films grown by PLD. Such films were deposited either on quartz resonators (AT-cut 16 MHz QCM with 4 mm gold electrodes on both sides), which were used for preparing the QCM gas sensors [11][12], or on Si substrates, which were used for further characterization of the films. Prior to deposition all substrates were cleaned in an ultrasonic bath with acetone and ethanol for 10 minutes, rinsed in deionized water and finally purged with synthetic air.…”

Section: Preparation Of the Gas Sensorsmentioning

confidence: 99%

“…When the QCM method is used for gas sensing, the surface properties of the sensing material are of higher importance, compared with its bulk. Very thin films are also applicable for gas sensors [11][12], while their morphology is of high importance. Also, compared with other methods, the advantages of QCM for sensing gases are the high sensitivity, simple technological implementation and easy real-time monitoring, capability of operating at room temperature, relative independence from electromagnetic fields and rapid temperature changes, fast response even at low concentrations, durability, portability, low energy consumption and cost [13][14].…”

Section: Introductionmentioning

confidence: 99%

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Characterization of PLD grown WO 3 thin films for gas sensing

Boyadjiev

Георгиева

Stefan

et al. 2017

Applied Surface Science

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Tungsten trioxide (WO 3 ) thin films were grown by pulsed laser deposition (PLD) with the aim to be applied in gas sensors. The films were studied by atomic force microscopy (AFM), X-ray diffraction (XRD), Fourier transform infrared (FTIR) spectroscopy and profilometry. To study the gas sensing behavior of these WO 3 films, they were deposited on quartz resonators and the quartz crystal microbalance (QCM) method was applied to analyze their gas sensitivity. Synthesis of tetragonal-WO 3 films starting from a target with predominantly monoclinic WO 3 phase was observed. The films deposited at 300 °C presented a surface topology favorable for the sorption properties, consisting of a film matrix with protruding craters/cavities. QCM prototype sensors with such films were tested for NO 2 sensing. The PLD grown WO 3 thin films show good sensitivity and fast reaction at -3/20 -room temperature, even in as-deposited state. With the presented technology, the manufacturing of QCM gas sensors is simple, fast and cost-effective, and it is also suitable for energy-effective portable equipment for on-line monitoring of environmental changes.

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Preparation and characterization of ALD deposited ZnO thin films studied for gas sensors

Cited by 62 publications

References 26 publications

TiO2/ZnO and ZnO/TiO2 core/shell nanofibers prepared by electrospinning and atomic layer deposition for photocatalysis and gas sensing

TiO2/ZnO and ZnO/TiO2 core/shell nanofibers prepared by electrospinning and atomic layer deposition for photocatalysis and gas sensing

Effects of Precursor Concentration on the Growth of ZnO Nanorods

Characterization of PLD grown WO 3 thin films for gas sensing

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