Preparation and Properties of Ag-Containing Diamond-Like Carbon Films by Magnetron Plasma Source Ion Implantation

Abstract

The doping effect of silver on the structure and properties of diamond-like carbon (DLC) films was investigated. The samples were prepared by a process combining acetylene plasma source ion implantation (high-voltage pulses of −10 kV) with reactive magnetron sputtering of an Ag disc. A mixture of two gases, argon, and acetylene was introduced into the discharge chamber as working gas for plasma formation. A negative high-voltage pulse was applied to the substrate holder, thus, accelerating ions towards the substrate. The chemical composition of the deposited films was modified by the respective gas flows and determined using X-ray photoelectron spectroscopy and secondary ion mass spectrometry. The silver concentration within the DLC films influenced the structure and the tribological properties. The surface roughness, as observed by scanning electron microscopy, increased with silver concentration. The film structure was characterized by Raman spectroscopy and X-ray diffractometry (XRD). The DLC films were mainly amorphous, containing crystalline silver, with the amount of silver depending on the process conditions. The tribological properties of the films were improved by the silver doping. The lowest friction coefficient of around 0.06 was derived at a low silver content.

Preparation, Characterization, and Preliminary Biocompatibility Evaluation of Carbon Ion-Implanted Silicone Rubber

“…It easy to form the iber capsule on the surface, at the same time, deformation, displacement, and even cause skin infection and ulceration. By modifying the surface of SR and obtaining the modiied SR material with good biocompatibility which it is expected to further improve the clinical therapeutic efect [22][23][24][25]. In this study, C ion implantation was used to modify SR.…”

Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties

“…In the case of tungsten, there are two phases involved, that is, the WC and the -WC 1− phase [27]. In the case of Mo, the carbide phase Mo 3 C 2 was detected for Mo concentrations of 11 at.% and above [28]. There is a transition from the metalcontaining amorphous phase for low concentrations to the metal carbide phase for higher concentrations.…”

Properties of Zinc-containing Diamond-like Carbon Films Prepared by Plasma Source Ion Implantation

“…Comparing the morphology of Zn-DLC films with those of Ag-DLC films [20,21], it can be noted that higher concentrations of Ag also lead to a rougher surface, but with globular features of various sizes. Although Ag and Zn are both rather soft and do generally not form carbides, the resulting surface structures are different.…”

“…The considerable increase of friction coefficient for small additions of the metal is in contrast to the findings for some metals other than Zn. With Ag it was noted that the addition of 1.8 at.% Ag reduced the friction coefficient as compared to the one of a pure DLC film [21]. For Mo, a larger percentage (11 at.%) is effective in reducing the friction coefficient [22].…”